7/31/2012	1:17:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2012	1:17:17 PM	Recipe started at 1:17 PM
7/31/2012	1:17:17 PM	Helium valve closed
7/31/2012	1:17:17 PM	H2 valve closed
7/31/2012	1:17:17 PM	BCl3 valve closed
7/31/2012	1:17:17 PM	PH3 valve closed
7/31/2012	1:17:17 PM	SiCl4 pre valve closed
7/31/2012	1:17:17 PM	SiCl4 post valve closed
7/31/2012	1:17:17 PM	Main Vac valve closed
7/31/2012	1:17:17 PM	Bypass valve closed
7/31/2012	1:17:17 PM	Bubbler valve closed
7/31/2012	1:17:17 PM	Helium MFC set to  0.000000
7/31/2012	1:17:17 PM	H2 MFC set to  0.000000
7/31/2012	1:17:17 PM	BCl3 MFC set to  0.000000
7/31/2012	1:17:17 PM	PH3 MFC set to  0.000000
7/31/2012	1:17:17 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:17:17 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:17:17 PM	Tube furnace set to 0
7/31/2012	1:17:20 PM	H2 valve closed
7/31/2012	1:17:20 PM	BCl3 valve closed
7/31/2012	1:17:20 PM	PH3 valve closed
7/31/2012	1:17:20 PM	SiCl4 pre valve closed
7/31/2012	1:17:20 PM	SiCl4 post valve closed
7/31/2012	1:17:20 PM	Main Vac valve closed
7/31/2012	1:17:20 PM	Bypass valve closed
7/31/2012	1:17:20 PM	Bubbler valve closed
7/31/2012	1:17:20 PM	Helium valve opened
7/31/2012	1:17:20 PM	Helium MFC set to  500.000000
7/31/2012	1:17:20 PM	H2 MFC set to  0.000000
7/31/2012	1:17:20 PM	BCl3 MFC set to  0.000000
7/31/2012	1:17:20 PM	PH3 MFC set to  0.000000
7/31/2012	1:17:20 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:17:20 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:17:20 PM	Tube furnace set to 0
7/31/2012	1:18:33 PM	Helium valve closed
7/31/2012	1:18:33 PM	H2 valve closed
7/31/2012	1:18:33 PM	BCl3 valve closed
7/31/2012	1:18:33 PM	PH3 valve closed
7/31/2012	1:18:33 PM	SiCl4 pre valve closed
7/31/2012	1:18:33 PM	SiCl4 post valve closed
7/31/2012	1:18:33 PM	Main Vac valve closed
7/31/2012	1:18:33 PM	Bypass valve closed
7/31/2012	1:18:33 PM	Bubbler valve closed
7/31/2012	1:18:33 PM	Helium MFC set to  0.000000
7/31/2012	1:18:33 PM	H2 MFC set to  0.000000
7/31/2012	1:18:33 PM	BCl3 MFC set to  0.000000
7/31/2012	1:18:33 PM	PH3 MFC set to  0.000000
7/31/2012	1:18:33 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:18:33 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:18:33 PM	Tube furnace set to 0
7/31/2012	1:18:34 PM	Run finished at 1:18 PM
7/31/2012	1:18:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2012	1:23:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2012	1:23:57 PM	Recipe started at 1:23 PM
7/31/2012	1:23:57 PM	Helium valve closed
7/31/2012	1:23:57 PM	H2 valve closed
7/31/2012	1:23:57 PM	BCl3 valve closed
7/31/2012	1:23:57 PM	PH3 valve closed
7/31/2012	1:23:57 PM	SiCl4 pre valve closed
7/31/2012	1:23:57 PM	SiCl4 post valve closed
7/31/2012	1:23:57 PM	Main Vac valve closed
7/31/2012	1:23:57 PM	Bubbler valve closed
7/31/2012	1:23:57 PM	Bypass valve opened
7/31/2012	1:23:57 PM	Helium MFC set to  0.000000
7/31/2012	1:23:57 PM	H2 MFC set to  0.000000
7/31/2012	1:23:57 PM	BCl3 MFC set to  0.000000
7/31/2012	1:23:57 PM	PH3 MFC set to  0.000000
7/31/2012	1:23:57 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:23:57 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:23:57 PM	Tube furnace set to 0
7/31/2012	1:25:17 PM	Helium valve closed
7/31/2012	1:25:17 PM	H2 valve closed
7/31/2012	1:25:17 PM	BCl3 valve closed
7/31/2012	1:25:17 PM	PH3 valve closed
7/31/2012	1:25:17 PM	SiCl4 pre valve closed
7/31/2012	1:25:17 PM	SiCl4 post valve closed
7/31/2012	1:25:17 PM	Main Vac valve closed
7/31/2012	1:25:17 PM	Bubbler valve closed
7/31/2012	1:25:17 PM	Bypass valve opened
7/31/2012	1:25:17 PM	Helium MFC set to  0.000000
7/31/2012	1:25:17 PM	H2 MFC set to  0.000000
7/31/2012	1:25:17 PM	BCl3 MFC set to  0.000000
7/31/2012	1:25:17 PM	PH3 MFC set to  0.000000
7/31/2012	1:25:17 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:25:17 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:25:17 PM	Tube furnace set to 0
7/31/2012	1:26:17 PM	Helium valve closed
7/31/2012	1:26:17 PM	H2 valve closed
7/31/2012	1:26:17 PM	BCl3 valve closed
7/31/2012	1:26:17 PM	PH3 valve closed
7/31/2012	1:26:17 PM	SiCl4 pre valve closed
7/31/2012	1:26:17 PM	SiCl4 post valve closed
7/31/2012	1:26:17 PM	Bypass valve closed
7/31/2012	1:26:17 PM	Bubbler valve closed
7/31/2012	1:26:17 PM	Main Vac valve opened
7/31/2012	1:26:17 PM	Helium MFC set to  0.000000
7/31/2012	1:26:17 PM	H2 MFC set to  0.000000
7/31/2012	1:26:17 PM	BCl3 MFC set to  0.000000
7/31/2012	1:26:17 PM	PH3 MFC set to  0.000000
7/31/2012	1:26:17 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:26:17 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:26:17 PM	Tube furnace set to 0
7/31/2012	1:26:18 PM	Run finished at 1:26 PM
7/31/2012	1:26:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2012	1:30:04 PM	Recipe started at 1:29 PM
7/31/2012	1:30:04 PM	Helium valve closed
7/31/2012	1:30:04 PM	H2 valve closed
7/31/2012	1:30:04 PM	BCl3 valve closed
7/31/2012	1:30:04 PM	PH3 valve closed
7/31/2012	1:30:04 PM	SiCl4 pre valve closed
7/31/2012	1:30:04 PM	SiCl4 post valve closed
7/31/2012	1:30:04 PM	Bypass valve closed
7/31/2012	1:30:04 PM	Bubbler valve closed
7/31/2012	1:30:04 PM	Main Vac valve opened
7/31/2012	1:30:04 PM	Helium MFC set to  0.000000
7/31/2012	1:30:04 PM	H2 MFC set to  0.000000
7/31/2012	1:30:04 PM	BCl3 MFC set to  0.000000
7/31/2012	1:30:04 PM	PH3 MFC set to  0.000000
7/31/2012	1:30:04 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:30:04 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:30:04 PM	Tube furnace set to 150
7/31/2012	1:30:34 PM	H2 valve closed
7/31/2012	1:30:34 PM	BCl3 valve closed
7/31/2012	1:30:34 PM	PH3 valve closed
7/31/2012	1:30:34 PM	SiCl4 pre valve closed
7/31/2012	1:30:34 PM	SiCl4 post valve closed
7/31/2012	1:30:34 PM	Bypass valve closed
7/31/2012	1:30:34 PM	Bubbler valve closed
7/31/2012	1:30:34 PM	Helium valve opened
7/31/2012	1:30:34 PM	Main Vac valve opened
7/31/2012	1:30:34 PM	Helium MFC set to  20.000000
7/31/2012	1:30:34 PM	H2 MFC set to  0.000000
7/31/2012	1:30:34 PM	BCl3 MFC set to  0.000000
7/31/2012	1:30:34 PM	PH3 MFC set to  0.000000
7/31/2012	1:30:34 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:30:34 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:30:35 PM	Tube furnace set to 150
7/31/2012	1:31:05 PM	Helium valve closed
7/31/2012	1:31:05 PM	H2 valve closed
7/31/2012	1:31:05 PM	BCl3 valve closed
7/31/2012	1:31:05 PM	PH3 valve closed
7/31/2012	1:31:05 PM	SiCl4 pre valve closed
7/31/2012	1:31:05 PM	SiCl4 post valve closed
7/31/2012	1:31:05 PM	Bypass valve closed
7/31/2012	1:31:05 PM	Bubbler valve closed
7/31/2012	1:31:05 PM	Main Vac valve opened
7/31/2012	1:31:05 PM	Helium MFC set to  0.000000
7/31/2012	1:31:05 PM	H2 MFC set to  0.000000
7/31/2012	1:31:05 PM	BCl3 MFC set to  0.000000
7/31/2012	1:31:05 PM	PH3 MFC set to  0.000000
7/31/2012	1:31:05 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:31:05 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:31:05 PM	Tube furnace set to 150
7/31/2012	1:31:35 PM	H2 valve closed
7/31/2012	1:31:35 PM	BCl3 valve closed
7/31/2012	1:31:35 PM	PH3 valve closed
7/31/2012	1:31:35 PM	SiCl4 pre valve closed
7/31/2012	1:31:35 PM	SiCl4 post valve closed
7/31/2012	1:31:35 PM	Bypass valve closed
7/31/2012	1:31:35 PM	Bubbler valve closed
7/31/2012	1:31:35 PM	Helium valve opened
7/31/2012	1:31:35 PM	Main Vac valve opened
7/31/2012	1:31:35 PM	Helium MFC set to  20.000000
7/31/2012	1:31:35 PM	H2 MFC set to  0.000000
7/31/2012	1:31:35 PM	BCl3 MFC set to  0.000000
7/31/2012	1:31:35 PM	PH3 MFC set to  0.000000
7/31/2012	1:31:35 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:31:35 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:31:35 PM	Tube furnace set to 150
7/31/2012	1:32:05 PM	Helium valve closed
7/31/2012	1:32:05 PM	H2 valve closed
7/31/2012	1:32:05 PM	BCl3 valve closed
7/31/2012	1:32:05 PM	PH3 valve closed
7/31/2012	1:32:05 PM	SiCl4 pre valve closed
7/31/2012	1:32:05 PM	SiCl4 post valve closed
7/31/2012	1:32:05 PM	Bypass valve closed
7/31/2012	1:32:05 PM	Bubbler valve closed
7/31/2012	1:32:05 PM	Main Vac valve opened
7/31/2012	1:32:05 PM	Helium MFC set to  0.000000
7/31/2012	1:32:05 PM	H2 MFC set to  0.000000
7/31/2012	1:32:05 PM	BCl3 MFC set to  0.000000
7/31/2012	1:32:05 PM	PH3 MFC set to  0.000000
7/31/2012	1:32:05 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:32:05 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:32:05 PM	Tube furnace set to 150
7/31/2012	1:32:35 PM	H2 valve closed
7/31/2012	1:32:35 PM	BCl3 valve closed
7/31/2012	1:32:35 PM	PH3 valve closed
7/31/2012	1:32:35 PM	SiCl4 pre valve closed
7/31/2012	1:32:35 PM	SiCl4 post valve closed
7/31/2012	1:32:35 PM	Bypass valve closed
7/31/2012	1:32:35 PM	Bubbler valve closed
7/31/2012	1:32:35 PM	Helium valve opened
7/31/2012	1:32:35 PM	Main Vac valve opened
7/31/2012	1:32:35 PM	Helium MFC set to  20.000000
7/31/2012	1:32:35 PM	H2 MFC set to  0.000000
7/31/2012	1:32:35 PM	BCl3 MFC set to  0.000000
7/31/2012	1:32:35 PM	PH3 MFC set to  0.000000
7/31/2012	1:32:35 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:32:35 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:32:36 PM	Tube furnace set to 150
7/31/2012	1:33:06 PM	Helium valve closed
7/31/2012	1:33:06 PM	H2 valve closed
7/31/2012	1:33:06 PM	BCl3 valve closed
7/31/2012	1:33:06 PM	PH3 valve closed
7/31/2012	1:33:06 PM	SiCl4 pre valve closed
7/31/2012	1:33:06 PM	SiCl4 post valve closed
7/31/2012	1:33:06 PM	Bypass valve closed
7/31/2012	1:33:06 PM	Bubbler valve closed
7/31/2012	1:33:06 PM	Main Vac valve opened
7/31/2012	1:33:06 PM	Helium MFC set to  0.000000
7/31/2012	1:33:06 PM	H2 MFC set to  0.000000
7/31/2012	1:33:06 PM	BCl3 MFC set to  0.000000
7/31/2012	1:33:06 PM	PH3 MFC set to  0.000000
7/31/2012	1:33:06 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:33:06 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:33:06 PM	Tube furnace set to 150
7/31/2012	1:33:36 PM	H2 valve closed
7/31/2012	1:33:36 PM	BCl3 valve closed
7/31/2012	1:33:36 PM	PH3 valve closed
7/31/2012	1:33:36 PM	SiCl4 pre valve closed
7/31/2012	1:33:36 PM	SiCl4 post valve closed
7/31/2012	1:33:36 PM	Bypass valve closed
7/31/2012	1:33:36 PM	Bubbler valve closed
7/31/2012	1:33:36 PM	Helium valve opened
7/31/2012	1:33:36 PM	Main Vac valve opened
7/31/2012	1:33:36 PM	Helium MFC set to  20.000000
7/31/2012	1:33:36 PM	H2 MFC set to  0.000000
7/31/2012	1:33:36 PM	BCl3 MFC set to  0.000000
7/31/2012	1:33:36 PM	PH3 MFC set to  0.000000
7/31/2012	1:33:36 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:33:36 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:33:36 PM	Tube furnace set to 150
7/31/2012	1:34:06 PM	Helium valve closed
7/31/2012	1:34:06 PM	H2 valve closed
7/31/2012	1:34:06 PM	BCl3 valve closed
7/31/2012	1:34:06 PM	PH3 valve closed
7/31/2012	1:34:06 PM	SiCl4 pre valve closed
7/31/2012	1:34:06 PM	SiCl4 post valve closed
7/31/2012	1:34:06 PM	Bypass valve closed
7/31/2012	1:34:06 PM	Bubbler valve closed
7/31/2012	1:34:06 PM	Main Vac valve opened
7/31/2012	1:34:06 PM	Helium MFC set to  0.000000
7/31/2012	1:34:06 PM	H2 MFC set to  0.000000
7/31/2012	1:34:06 PM	BCl3 MFC set to  0.000000
7/31/2012	1:34:06 PM	PH3 MFC set to  0.000000
7/31/2012	1:34:06 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:34:06 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:34:06 PM	Tube furnace set to 150
7/31/2012	1:34:36 PM	H2 valve closed
7/31/2012	1:34:36 PM	BCl3 valve closed
7/31/2012	1:34:36 PM	PH3 valve closed
7/31/2012	1:34:36 PM	SiCl4 pre valve closed
7/31/2012	1:34:36 PM	SiCl4 post valve closed
7/31/2012	1:34:36 PM	Bypass valve closed
7/31/2012	1:34:36 PM	Bubbler valve closed
7/31/2012	1:34:36 PM	Helium valve opened
7/31/2012	1:34:36 PM	Main Vac valve opened
7/31/2012	1:34:36 PM	Helium MFC set to  20.000000
7/31/2012	1:34:36 PM	H2 MFC set to  0.000000
7/31/2012	1:34:36 PM	BCl3 MFC set to  0.000000
7/31/2012	1:34:36 PM	PH3 MFC set to  0.000000
7/31/2012	1:34:36 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:34:36 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:34:37 PM	Tube furnace set to 150
7/31/2012	1:35:07 PM	Helium valve closed
7/31/2012	1:35:07 PM	H2 valve closed
7/31/2012	1:35:07 PM	BCl3 valve closed
7/31/2012	1:35:07 PM	PH3 valve closed
7/31/2012	1:35:07 PM	SiCl4 pre valve closed
7/31/2012	1:35:07 PM	SiCl4 post valve closed
7/31/2012	1:35:07 PM	Bypass valve closed
7/31/2012	1:35:07 PM	Bubbler valve closed
7/31/2012	1:35:07 PM	Main Vac valve opened
7/31/2012	1:35:07 PM	Helium MFC set to  0.000000
7/31/2012	1:35:07 PM	H2 MFC set to  0.000000
7/31/2012	1:35:07 PM	BCl3 MFC set to  0.000000
7/31/2012	1:35:07 PM	PH3 MFC set to  0.000000
7/31/2012	1:35:07 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:35:07 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:35:07 PM	Tube furnace set to 150
7/31/2012	1:35:37 PM	H2 valve closed
7/31/2012	1:35:37 PM	BCl3 valve closed
7/31/2012	1:35:37 PM	PH3 valve closed
7/31/2012	1:35:37 PM	SiCl4 pre valve closed
7/31/2012	1:35:37 PM	SiCl4 post valve closed
7/31/2012	1:35:37 PM	Bypass valve closed
7/31/2012	1:35:37 PM	Bubbler valve closed
7/31/2012	1:35:37 PM	Helium valve opened
7/31/2012	1:35:37 PM	Main Vac valve opened
7/31/2012	1:35:37 PM	Helium MFC set to  20.000000
7/31/2012	1:35:37 PM	H2 MFC set to  0.000000
7/31/2012	1:35:37 PM	BCl3 MFC set to  0.000000
7/31/2012	1:35:37 PM	PH3 MFC set to  0.000000
7/31/2012	1:35:37 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:35:37 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:35:37 PM	Tube furnace set to 150
7/31/2012	1:36:07 PM	Helium valve closed
7/31/2012	1:36:07 PM	H2 valve closed
7/31/2012	1:36:07 PM	BCl3 valve closed
7/31/2012	1:36:07 PM	PH3 valve closed
7/31/2012	1:36:07 PM	SiCl4 pre valve closed
7/31/2012	1:36:07 PM	SiCl4 post valve closed
7/31/2012	1:36:07 PM	Bypass valve closed
7/31/2012	1:36:07 PM	Bubbler valve closed
7/31/2012	1:36:07 PM	Main Vac valve opened
7/31/2012	1:36:07 PM	Helium MFC set to  0.000000
7/31/2012	1:36:07 PM	H2 MFC set to  0.000000
7/31/2012	1:36:07 PM	BCl3 MFC set to  0.000000
7/31/2012	1:36:07 PM	PH3 MFC set to  0.000000
7/31/2012	1:36:07 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:36:07 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:36:07 PM	Tube furnace set to 150
7/31/2012	1:36:37 PM	H2 valve closed
7/31/2012	1:36:37 PM	BCl3 valve closed
7/31/2012	1:36:37 PM	PH3 valve closed
7/31/2012	1:36:37 PM	SiCl4 pre valve closed
7/31/2012	1:36:37 PM	SiCl4 post valve closed
7/31/2012	1:36:37 PM	Bypass valve closed
7/31/2012	1:36:37 PM	Bubbler valve closed
7/31/2012	1:36:37 PM	Helium valve opened
7/31/2012	1:36:37 PM	Main Vac valve opened
7/31/2012	1:36:37 PM	Helium MFC set to  20.000000
7/31/2012	1:36:37 PM	H2 MFC set to  0.000000
7/31/2012	1:36:37 PM	BCl3 MFC set to  0.000000
7/31/2012	1:36:37 PM	PH3 MFC set to  0.000000
7/31/2012	1:36:37 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:36:37 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:36:37 PM	Tube furnace set to 150
7/31/2012	1:37:07 PM	Helium valve closed
7/31/2012	1:37:07 PM	H2 valve closed
7/31/2012	1:37:07 PM	BCl3 valve closed
7/31/2012	1:37:07 PM	PH3 valve closed
7/31/2012	1:37:07 PM	SiCl4 pre valve closed
7/31/2012	1:37:08 PM	SiCl4 post valve closed
7/31/2012	1:37:08 PM	Bypass valve closed
7/31/2012	1:37:08 PM	Bubbler valve closed
7/31/2012	1:37:08 PM	Main Vac valve opened
7/31/2012	1:37:08 PM	Helium MFC set to  0.000000
7/31/2012	1:37:08 PM	H2 MFC set to  0.000000
7/31/2012	1:37:08 PM	BCl3 MFC set to  0.000000
7/31/2012	1:37:08 PM	PH3 MFC set to  0.000000
7/31/2012	1:37:08 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:37:08 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:37:08 PM	Tube furnace set to 150
7/31/2012	1:37:38 PM	H2 valve closed
7/31/2012	1:37:38 PM	BCl3 valve closed
7/31/2012	1:37:38 PM	PH3 valve closed
7/31/2012	1:37:38 PM	SiCl4 pre valve closed
7/31/2012	1:37:38 PM	SiCl4 post valve closed
7/31/2012	1:37:38 PM	Bypass valve closed
7/31/2012	1:37:38 PM	Bubbler valve closed
7/31/2012	1:37:38 PM	Helium valve opened
7/31/2012	1:37:38 PM	Main Vac valve opened
7/31/2012	1:37:38 PM	Helium MFC set to  20.000000
7/31/2012	1:37:38 PM	H2 MFC set to  0.000000
7/31/2012	1:37:38 PM	BCl3 MFC set to  0.000000
7/31/2012	1:37:38 PM	PH3 MFC set to  0.000000
7/31/2012	1:37:38 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:37:38 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:37:38 PM	Tube furnace set to 150
7/31/2012	1:38:08 PM	Helium valve closed
7/31/2012	1:38:08 PM	H2 valve closed
7/31/2012	1:38:08 PM	BCl3 valve closed
7/31/2012	1:38:08 PM	PH3 valve closed
7/31/2012	1:38:08 PM	SiCl4 pre valve closed
7/31/2012	1:38:08 PM	SiCl4 post valve closed
7/31/2012	1:38:08 PM	Bypass valve closed
7/31/2012	1:38:08 PM	Bubbler valve closed
7/31/2012	1:38:08 PM	Main Vac valve opened
7/31/2012	1:38:08 PM	Helium MFC set to  0.000000
7/31/2012	1:38:08 PM	H2 MFC set to  0.000000
7/31/2012	1:38:08 PM	BCl3 MFC set to  0.000000
7/31/2012	1:38:08 PM	PH3 MFC set to  0.000000
7/31/2012	1:38:08 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:38:08 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:38:08 PM	Tube furnace set to 150
7/31/2012	1:38:38 PM	H2 valve closed
7/31/2012	1:38:38 PM	BCl3 valve closed
7/31/2012	1:38:38 PM	PH3 valve closed
7/31/2012	1:38:38 PM	SiCl4 pre valve closed
7/31/2012	1:38:38 PM	SiCl4 post valve closed
7/31/2012	1:38:38 PM	Bypass valve closed
7/31/2012	1:38:38 PM	Bubbler valve closed
7/31/2012	1:38:38 PM	Helium valve opened
7/31/2012	1:38:38 PM	Main Vac valve opened
7/31/2012	1:38:38 PM	Helium MFC set to  20.000000
7/31/2012	1:38:38 PM	H2 MFC set to  0.000000
7/31/2012	1:38:38 PM	BCl3 MFC set to  0.000000
7/31/2012	1:38:38 PM	PH3 MFC set to  0.000000
7/31/2012	1:38:38 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:38:38 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:38:38 PM	Tube furnace set to 150
7/31/2012	1:39:08 PM	Helium valve closed
7/31/2012	1:39:08 PM	H2 valve closed
7/31/2012	1:39:08 PM	BCl3 valve closed
7/31/2012	1:39:08 PM	PH3 valve closed
7/31/2012	1:39:08 PM	SiCl4 pre valve closed
7/31/2012	1:39:08 PM	SiCl4 post valve closed
7/31/2012	1:39:08 PM	Bypass valve closed
7/31/2012	1:39:08 PM	Bubbler valve closed
7/31/2012	1:39:08 PM	Main Vac valve opened
7/31/2012	1:39:08 PM	Helium MFC set to  0.000000
7/31/2012	1:39:08 PM	H2 MFC set to  0.000000
7/31/2012	1:39:08 PM	BCl3 MFC set to  0.000000
7/31/2012	1:39:08 PM	PH3 MFC set to  0.000000
7/31/2012	1:39:09 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:39:09 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:39:09 PM	Tube furnace set to 150
7/31/2012	1:39:39 PM	H2 valve closed
7/31/2012	1:39:39 PM	BCl3 valve closed
7/31/2012	1:39:39 PM	PH3 valve closed
7/31/2012	1:39:39 PM	SiCl4 pre valve closed
7/31/2012	1:39:39 PM	SiCl4 post valve closed
7/31/2012	1:39:39 PM	Bypass valve closed
7/31/2012	1:39:39 PM	Bubbler valve closed
7/31/2012	1:39:39 PM	Helium valve opened
7/31/2012	1:39:39 PM	Main Vac valve opened
7/31/2012	1:39:39 PM	Helium MFC set to  20.000000
7/31/2012	1:39:39 PM	H2 MFC set to  0.000000
7/31/2012	1:39:39 PM	BCl3 MFC set to  0.000000
7/31/2012	1:39:39 PM	PH3 MFC set to  0.000000
7/31/2012	1:39:39 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:39:39 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:39:39 PM	Tube furnace set to 150
7/31/2012	1:40:09 PM	Helium valve closed
7/31/2012	1:40:09 PM	H2 valve closed
7/31/2012	1:40:09 PM	BCl3 valve closed
7/31/2012	1:40:09 PM	PH3 valve closed
7/31/2012	1:40:09 PM	SiCl4 pre valve closed
7/31/2012	1:40:09 PM	SiCl4 post valve closed
7/31/2012	1:40:09 PM	Bypass valve closed
7/31/2012	1:40:09 PM	Bubbler valve closed
7/31/2012	1:40:09 PM	Main Vac valve opened
7/31/2012	1:40:09 PM	Helium MFC set to  0.000000
7/31/2012	1:40:09 PM	H2 MFC set to  0.000000
7/31/2012	1:40:09 PM	BCl3 MFC set to  0.000000
7/31/2012	1:40:09 PM	PH3 MFC set to  0.000000
7/31/2012	1:40:09 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:40:09 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:40:09 PM	Tube furnace set to 150
7/31/2012	1:40:10 PM	Run finished at 1:40 PM
7/31/2012	1:42:23 PM	Recipe started at 1:42 PM
7/31/2012	1:42:23 PM	Helium valve closed
7/31/2012	1:42:23 PM	H2 valve closed
7/31/2012	1:42:23 PM	BCl3 valve closed
7/31/2012	1:42:23 PM	PH3 valve closed
7/31/2012	1:42:23 PM	SiCl4 pre valve closed
7/31/2012	1:42:23 PM	SiCl4 post valve closed
7/31/2012	1:42:23 PM	Bypass valve closed
7/31/2012	1:42:23 PM	Bubbler valve closed
7/31/2012	1:42:23 PM	Main Vac valve opened
7/31/2012	1:42:23 PM	Helium MFC set to  0.000000
7/31/2012	1:42:23 PM	H2 MFC set to  0.000000
7/31/2012	1:42:23 PM	BCl3 MFC set to  0.000000
7/31/2012	1:42:23 PM	PH3 MFC set to  0.000000
7/31/2012	1:42:23 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:42:23 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:42:23 PM	Tube furnace set to 150
7/31/2012	1:42:54 PM	H2 valve closed
7/31/2012	1:42:54 PM	BCl3 valve closed
7/31/2012	1:42:54 PM	PH3 valve closed
7/31/2012	1:42:54 PM	SiCl4 pre valve closed
7/31/2012	1:42:54 PM	SiCl4 post valve closed
7/31/2012	1:42:54 PM	Bypass valve closed
7/31/2012	1:42:54 PM	Bubbler valve closed
7/31/2012	1:42:54 PM	Helium valve opened
7/31/2012	1:42:54 PM	Main Vac valve opened
7/31/2012	1:42:54 PM	Helium MFC set to  20.000000
7/31/2012	1:42:54 PM	H2 MFC set to  0.000000
7/31/2012	1:42:54 PM	BCl3 MFC set to  0.000000
7/31/2012	1:42:54 PM	PH3 MFC set to  0.000000
7/31/2012	1:42:54 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:42:54 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:42:54 PM	Tube furnace set to 150
7/31/2012	1:43:24 PM	Helium valve closed
7/31/2012	1:43:24 PM	H2 valve closed
7/31/2012	1:43:24 PM	BCl3 valve closed
7/31/2012	1:43:24 PM	PH3 valve closed
7/31/2012	1:43:24 PM	SiCl4 pre valve closed
7/31/2012	1:43:24 PM	SiCl4 post valve closed
7/31/2012	1:43:24 PM	Bypass valve closed
7/31/2012	1:43:24 PM	Bubbler valve closed
7/31/2012	1:43:24 PM	Main Vac valve opened
7/31/2012	1:43:24 PM	Helium MFC set to  0.000000
7/31/2012	1:43:24 PM	H2 MFC set to  0.000000
7/31/2012	1:43:24 PM	BCl3 MFC set to  0.000000
7/31/2012	1:43:24 PM	PH3 MFC set to  0.000000
7/31/2012	1:43:24 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:43:24 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:43:24 PM	Tube furnace set to 150
7/31/2012	1:43:54 PM	H2 valve closed
7/31/2012	1:43:54 PM	BCl3 valve closed
7/31/2012	1:43:54 PM	PH3 valve closed
7/31/2012	1:43:54 PM	SiCl4 pre valve closed
7/31/2012	1:43:54 PM	SiCl4 post valve closed
7/31/2012	1:43:54 PM	Bypass valve closed
7/31/2012	1:43:54 PM	Bubbler valve closed
7/31/2012	1:43:54 PM	Helium valve opened
7/31/2012	1:43:54 PM	Main Vac valve opened
7/31/2012	1:43:54 PM	Helium MFC set to  20.000000
7/31/2012	1:43:54 PM	H2 MFC set to  0.000000
7/31/2012	1:43:54 PM	BCl3 MFC set to  0.000000
7/31/2012	1:43:54 PM	PH3 MFC set to  0.000000
7/31/2012	1:43:54 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:43:54 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:43:54 PM	Tube furnace set to 150
7/31/2012	1:44:24 PM	Helium valve closed
7/31/2012	1:44:24 PM	H2 valve closed
7/31/2012	1:44:24 PM	BCl3 valve closed
7/31/2012	1:44:24 PM	PH3 valve closed
7/31/2012	1:44:24 PM	SiCl4 pre valve closed
7/31/2012	1:44:24 PM	SiCl4 post valve closed
7/31/2012	1:44:24 PM	Bypass valve closed
7/31/2012	1:44:24 PM	Bubbler valve closed
7/31/2012	1:44:24 PM	Main Vac valve opened
7/31/2012	1:44:24 PM	Helium MFC set to  0.000000
7/31/2012	1:44:24 PM	H2 MFC set to  0.000000
7/31/2012	1:44:24 PM	BCl3 MFC set to  0.000000
7/31/2012	1:44:24 PM	PH3 MFC set to  0.000000
7/31/2012	1:44:24 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:44:24 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:44:24 PM	Tube furnace set to 150
7/31/2012	1:44:54 PM	H2 valve closed
7/31/2012	1:44:54 PM	BCl3 valve closed
7/31/2012	1:44:54 PM	PH3 valve closed
7/31/2012	1:44:54 PM	SiCl4 pre valve closed
7/31/2012	1:44:54 PM	SiCl4 post valve closed
7/31/2012	1:44:54 PM	Bypass valve closed
7/31/2012	1:44:54 PM	Bubbler valve closed
7/31/2012	1:44:54 PM	Helium valve opened
7/31/2012	1:44:54 PM	Main Vac valve opened
7/31/2012	1:44:54 PM	Helium MFC set to  20.000000
7/31/2012	1:44:54 PM	H2 MFC set to  0.000000
7/31/2012	1:44:54 PM	BCl3 MFC set to  0.000000
7/31/2012	1:44:54 PM	PH3 MFC set to  0.000000
7/31/2012	1:44:54 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:44:54 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:44:55 PM	Tube furnace set to 150
7/31/2012	1:45:25 PM	Helium valve closed
7/31/2012	1:45:25 PM	H2 valve closed
7/31/2012	1:45:25 PM	BCl3 valve closed
7/31/2012	1:45:25 PM	PH3 valve closed
7/31/2012	1:45:25 PM	SiCl4 pre valve closed
7/31/2012	1:45:25 PM	SiCl4 post valve closed
7/31/2012	1:45:25 PM	Bypass valve closed
7/31/2012	1:45:25 PM	Bubbler valve closed
7/31/2012	1:45:25 PM	Main Vac valve opened
7/31/2012	1:45:25 PM	Helium MFC set to  0.000000
7/31/2012	1:45:25 PM	H2 MFC set to  0.000000
7/31/2012	1:45:25 PM	BCl3 MFC set to  0.000000
7/31/2012	1:45:25 PM	PH3 MFC set to  0.000000
7/31/2012	1:45:25 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:45:25 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:45:25 PM	Tube furnace set to 150
7/31/2012	1:45:55 PM	H2 valve closed
7/31/2012	1:45:55 PM	BCl3 valve closed
7/31/2012	1:45:55 PM	PH3 valve closed
7/31/2012	1:45:55 PM	SiCl4 pre valve closed
7/31/2012	1:45:55 PM	SiCl4 post valve closed
7/31/2012	1:45:55 PM	Bypass valve closed
7/31/2012	1:45:55 PM	Bubbler valve closed
7/31/2012	1:45:55 PM	Helium valve opened
7/31/2012	1:45:55 PM	Main Vac valve opened
7/31/2012	1:45:55 PM	Helium MFC set to  20.000000
7/31/2012	1:45:55 PM	H2 MFC set to  0.000000
7/31/2012	1:45:55 PM	BCl3 MFC set to  0.000000
7/31/2012	1:45:55 PM	PH3 MFC set to  0.000000
7/31/2012	1:45:55 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:45:55 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:45:55 PM	Tube furnace set to 150
7/31/2012	1:46:25 PM	Helium valve closed
7/31/2012	1:46:25 PM	H2 valve closed
7/31/2012	1:46:25 PM	BCl3 valve closed
7/31/2012	1:46:25 PM	PH3 valve closed
7/31/2012	1:46:25 PM	SiCl4 pre valve closed
7/31/2012	1:46:25 PM	SiCl4 post valve closed
7/31/2012	1:46:25 PM	Bypass valve closed
7/31/2012	1:46:25 PM	Bubbler valve closed
7/31/2012	1:46:25 PM	Main Vac valve opened
7/31/2012	1:46:25 PM	Helium MFC set to  0.000000
7/31/2012	1:46:25 PM	H2 MFC set to  0.000000
7/31/2012	1:46:25 PM	BCl3 MFC set to  0.000000
7/31/2012	1:46:25 PM	PH3 MFC set to  0.000000
7/31/2012	1:46:25 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:46:25 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:46:25 PM	Tube furnace set to 150
7/31/2012	1:46:55 PM	H2 valve closed
7/31/2012	1:46:55 PM	BCl3 valve closed
7/31/2012	1:46:55 PM	PH3 valve closed
7/31/2012	1:46:55 PM	SiCl4 pre valve closed
7/31/2012	1:46:55 PM	SiCl4 post valve closed
7/31/2012	1:46:55 PM	Bypass valve closed
7/31/2012	1:46:55 PM	Bubbler valve closed
7/31/2012	1:46:55 PM	Helium valve opened
7/31/2012	1:46:55 PM	Main Vac valve opened
7/31/2012	1:46:55 PM	Helium MFC set to  20.000000
7/31/2012	1:46:55 PM	H2 MFC set to  0.000000
7/31/2012	1:46:55 PM	BCl3 MFC set to  0.000000
7/31/2012	1:46:55 PM	PH3 MFC set to  0.000000
7/31/2012	1:46:55 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:46:55 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:46:55 PM	Tube furnace set to 150
7/31/2012	1:47:25 PM	Helium valve closed
7/31/2012	1:47:25 PM	H2 valve closed
7/31/2012	1:47:25 PM	BCl3 valve closed
7/31/2012	1:47:26 PM	PH3 valve closed
7/31/2012	1:47:26 PM	SiCl4 pre valve closed
7/31/2012	1:47:26 PM	SiCl4 post valve closed
7/31/2012	1:47:26 PM	Bypass valve closed
7/31/2012	1:47:26 PM	Bubbler valve closed
7/31/2012	1:47:26 PM	Main Vac valve opened
7/31/2012	1:47:26 PM	Helium MFC set to  0.000000
7/31/2012	1:47:26 PM	H2 MFC set to  0.000000
7/31/2012	1:47:26 PM	BCl3 MFC set to  0.000000
7/31/2012	1:47:26 PM	PH3 MFC set to  0.000000
7/31/2012	1:47:26 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:47:26 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:47:26 PM	Tube furnace set to 150
7/31/2012	1:47:56 PM	H2 valve closed
7/31/2012	1:47:56 PM	BCl3 valve closed
7/31/2012	1:47:56 PM	PH3 valve closed
7/31/2012	1:47:56 PM	SiCl4 pre valve closed
7/31/2012	1:47:56 PM	SiCl4 post valve closed
7/31/2012	1:47:56 PM	Bypass valve closed
7/31/2012	1:47:56 PM	Bubbler valve closed
7/31/2012	1:47:56 PM	Helium valve opened
7/31/2012	1:47:56 PM	Main Vac valve opened
7/31/2012	1:47:56 PM	Helium MFC set to  20.000000
7/31/2012	1:47:56 PM	H2 MFC set to  0.000000
7/31/2012	1:47:56 PM	BCl3 MFC set to  0.000000
7/31/2012	1:47:56 PM	PH3 MFC set to  0.000000
7/31/2012	1:47:56 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:47:56 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:47:56 PM	Tube furnace set to 150
7/31/2012	1:48:26 PM	Helium valve closed
7/31/2012	1:48:26 PM	H2 valve closed
7/31/2012	1:48:26 PM	BCl3 valve closed
7/31/2012	1:48:26 PM	PH3 valve closed
7/31/2012	1:48:26 PM	SiCl4 pre valve closed
7/31/2012	1:48:26 PM	SiCl4 post valve closed
7/31/2012	1:48:26 PM	Bypass valve closed
7/31/2012	1:48:26 PM	Bubbler valve closed
7/31/2012	1:48:26 PM	Main Vac valve opened
7/31/2012	1:48:26 PM	Helium MFC set to  0.000000
7/31/2012	1:48:26 PM	H2 MFC set to  0.000000
7/31/2012	1:48:26 PM	BCl3 MFC set to  0.000000
7/31/2012	1:48:26 PM	PH3 MFC set to  0.000000
7/31/2012	1:48:26 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:48:26 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:48:26 PM	Tube furnace set to 150
7/31/2012	1:48:56 PM	H2 valve closed
7/31/2012	1:48:56 PM	BCl3 valve closed
7/31/2012	1:48:56 PM	PH3 valve closed
7/31/2012	1:48:56 PM	SiCl4 pre valve closed
7/31/2012	1:48:56 PM	SiCl4 post valve closed
7/31/2012	1:48:56 PM	Bypass valve closed
7/31/2012	1:48:56 PM	Bubbler valve closed
7/31/2012	1:48:56 PM	Helium valve opened
7/31/2012	1:48:56 PM	Main Vac valve opened
7/31/2012	1:48:56 PM	Helium MFC set to  20.000000
7/31/2012	1:48:56 PM	H2 MFC set to  0.000000
7/31/2012	1:48:56 PM	BCl3 MFC set to  0.000000
7/31/2012	1:48:56 PM	PH3 MFC set to  0.000000
7/31/2012	1:48:56 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:48:56 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:48:56 PM	Tube furnace set to 150
7/31/2012	1:49:26 PM	Helium valve closed
7/31/2012	1:49:26 PM	H2 valve closed
7/31/2012	1:49:26 PM	BCl3 valve closed
7/31/2012	1:49:26 PM	PH3 valve closed
7/31/2012	1:49:26 PM	SiCl4 pre valve closed
7/31/2012	1:49:26 PM	SiCl4 post valve closed
7/31/2012	1:49:26 PM	Bypass valve closed
7/31/2012	1:49:26 PM	Bubbler valve closed
7/31/2012	1:49:26 PM	Main Vac valve opened
7/31/2012	1:49:26 PM	Helium MFC set to  0.000000
7/31/2012	1:49:26 PM	H2 MFC set to  0.000000
7/31/2012	1:49:26 PM	BCl3 MFC set to  0.000000
7/31/2012	1:49:26 PM	PH3 MFC set to  0.000000
7/31/2012	1:49:26 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:49:26 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:49:27 PM	Tube furnace set to 150
7/31/2012	1:49:57 PM	H2 valve closed
7/31/2012	1:49:57 PM	BCl3 valve closed
7/31/2012	1:49:57 PM	PH3 valve closed
7/31/2012	1:49:57 PM	SiCl4 pre valve closed
7/31/2012	1:49:57 PM	SiCl4 post valve closed
7/31/2012	1:49:57 PM	Bypass valve closed
7/31/2012	1:49:57 PM	Bubbler valve closed
7/31/2012	1:49:57 PM	Helium valve opened
7/31/2012	1:49:57 PM	Main Vac valve opened
7/31/2012	1:49:57 PM	Helium MFC set to  20.000000
7/31/2012	1:49:57 PM	H2 MFC set to  0.000000
7/31/2012	1:49:57 PM	BCl3 MFC set to  0.000000
7/31/2012	1:49:57 PM	PH3 MFC set to  0.000000
7/31/2012	1:49:57 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:49:57 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:49:57 PM	Tube furnace set to 150
7/31/2012	1:50:27 PM	Helium valve closed
7/31/2012	1:50:27 PM	H2 valve closed
7/31/2012	1:50:27 PM	BCl3 valve closed
7/31/2012	1:50:27 PM	PH3 valve closed
7/31/2012	1:50:27 PM	SiCl4 pre valve closed
7/31/2012	1:50:27 PM	SiCl4 post valve closed
7/31/2012	1:50:27 PM	Bypass valve closed
7/31/2012	1:50:27 PM	Bubbler valve closed
7/31/2012	1:50:27 PM	Main Vac valve opened
7/31/2012	1:50:27 PM	Helium MFC set to  0.000000
7/31/2012	1:50:27 PM	H2 MFC set to  0.000000
7/31/2012	1:50:27 PM	BCl3 MFC set to  0.000000
7/31/2012	1:50:27 PM	PH3 MFC set to  0.000000
7/31/2012	1:50:27 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:50:27 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:50:27 PM	Tube furnace set to 150
7/31/2012	1:50:57 PM	H2 valve closed
7/31/2012	1:50:57 PM	BCl3 valve closed
7/31/2012	1:50:57 PM	PH3 valve closed
7/31/2012	1:50:57 PM	SiCl4 pre valve closed
7/31/2012	1:50:57 PM	SiCl4 post valve closed
7/31/2012	1:50:57 PM	Bypass valve closed
7/31/2012	1:50:57 PM	Bubbler valve closed
7/31/2012	1:50:57 PM	Helium valve opened
7/31/2012	1:50:57 PM	Main Vac valve opened
7/31/2012	1:50:57 PM	Helium MFC set to  20.000000
7/31/2012	1:50:57 PM	H2 MFC set to  0.000000
7/31/2012	1:50:57 PM	BCl3 MFC set to  0.000000
7/31/2012	1:50:57 PM	PH3 MFC set to  0.000000
7/31/2012	1:50:57 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:50:57 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:50:57 PM	Tube furnace set to 150
7/31/2012	1:51:27 PM	Helium valve closed
7/31/2012	1:51:27 PM	H2 valve closed
7/31/2012	1:51:27 PM	BCl3 valve closed
7/31/2012	1:51:27 PM	PH3 valve closed
7/31/2012	1:51:27 PM	SiCl4 pre valve closed
7/31/2012	1:51:27 PM	SiCl4 post valve closed
7/31/2012	1:51:27 PM	Bypass valve closed
7/31/2012	1:51:27 PM	Bubbler valve closed
7/31/2012	1:51:27 PM	Main Vac valve opened
7/31/2012	1:51:27 PM	Helium MFC set to  0.000000
7/31/2012	1:51:27 PM	H2 MFC set to  0.000000
7/31/2012	1:51:27 PM	BCl3 MFC set to  0.000000
7/31/2012	1:51:27 PM	PH3 MFC set to  0.000000
7/31/2012	1:51:27 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:51:27 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:51:28 PM	Tube furnace set to 150
7/31/2012	1:51:58 PM	H2 valve closed
7/31/2012	1:51:58 PM	BCl3 valve closed
7/31/2012	1:51:58 PM	PH3 valve closed
7/31/2012	1:51:58 PM	SiCl4 pre valve closed
7/31/2012	1:51:58 PM	SiCl4 post valve closed
7/31/2012	1:51:58 PM	Bypass valve closed
7/31/2012	1:51:58 PM	Bubbler valve closed
7/31/2012	1:51:58 PM	Helium valve opened
7/31/2012	1:51:58 PM	Main Vac valve opened
7/31/2012	1:51:58 PM	Helium MFC set to  20.000000
7/31/2012	1:51:58 PM	H2 MFC set to  0.000000
7/31/2012	1:51:58 PM	BCl3 MFC set to  0.000000
7/31/2012	1:51:58 PM	PH3 MFC set to  0.000000
7/31/2012	1:51:58 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:51:58 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:51:58 PM	Tube furnace set to 150
7/31/2012	1:52:28 PM	Helium valve closed
7/31/2012	1:52:28 PM	H2 valve closed
7/31/2012	1:52:28 PM	BCl3 valve closed
7/31/2012	1:52:28 PM	PH3 valve closed
7/31/2012	1:52:28 PM	SiCl4 pre valve closed
7/31/2012	1:52:28 PM	SiCl4 post valve closed
7/31/2012	1:52:28 PM	Bypass valve closed
7/31/2012	1:52:28 PM	Bubbler valve closed
7/31/2012	1:52:28 PM	Main Vac valve opened
7/31/2012	1:52:28 PM	Helium MFC set to  0.000000
7/31/2012	1:52:28 PM	H2 MFC set to  0.000000
7/31/2012	1:52:28 PM	BCl3 MFC set to  0.000000
7/31/2012	1:52:28 PM	PH3 MFC set to  0.000000
7/31/2012	1:52:28 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:52:28 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:52:28 PM	Tube furnace set to 150
7/31/2012	1:52:29 PM	Run finished at 1:52 PM
7/31/2012	1:54:16 PM	Helium MFC set to  20.000000
7/31/2012	1:54:17 PM	Helium valve opened
7/31/2012	1:55:24 PM	Helium valve closed
7/31/2012	1:55:57 PM	Helium valve opened
7/31/2012	1:56:30 PM	Helium valve closed
7/31/2012	1:56:36 PM	Helium MFC set to  0.000000
7/31/2012	1:58:19 PM	Main Vac valve closed
7/31/2012	1:58:25 PM	Main Vac valve opened
7/31/2012	1:59:41 PM	Recipe started at 1:59 PM
7/31/2012	1:59:41 PM	Helium valve closed
7/31/2012	1:59:41 PM	H2 valve closed
7/31/2012	1:59:41 PM	BCl3 valve closed
7/31/2012	1:59:41 PM	PH3 valve closed
7/31/2012	1:59:41 PM	SiCl4 pre valve closed
7/31/2012	1:59:41 PM	SiCl4 post valve closed
7/31/2012	1:59:41 PM	Main Vac valve closed
7/31/2012	1:59:41 PM	Bypass valve closed
7/31/2012	1:59:41 PM	Bubbler valve closed
7/31/2012	1:59:41 PM	Helium MFC set to  0.000000
7/31/2012	1:59:41 PM	H2 MFC set to  0.000000
7/31/2012	1:59:41 PM	BCl3 MFC set to  0.000000
7/31/2012	1:59:41 PM	PH3 MFC set to  0.000000
7/31/2012	1:59:41 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:59:41 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:59:41 PM	Tube furnace set to 0
7/31/2012	1:59:44 PM	Helium valve closed
7/31/2012	1:59:44 PM	BCl3 valve closed
7/31/2012	1:59:44 PM	PH3 valve closed
7/31/2012	1:59:44 PM	SiCl4 pre valve closed
7/31/2012	1:59:44 PM	SiCl4 post valve closed
7/31/2012	1:59:44 PM	Main Vac valve closed
7/31/2012	1:59:44 PM	Bypass valve closed
7/31/2012	1:59:44 PM	Bubbler valve closed
7/31/2012	1:59:44 PM	H2 valve opened
7/31/2012	1:59:44 PM	Helium MFC set to  0.000000
7/31/2012	1:59:44 PM	H2 MFC set to  500.000000
7/31/2012	1:59:44 PM	BCl3 MFC set to  0.000000
7/31/2012	1:59:44 PM	PH3 MFC set to  0.000000
7/31/2012	1:59:44 PM	SiCl4 MFC set to  0.000000
7/31/2012	1:59:44 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	1:59:44 PM	Tube furnace set to 0
7/31/2012	2:00:56 PM	Helium valve closed
7/31/2012	2:00:56 PM	BCl3 valve closed
7/31/2012	2:00:56 PM	PH3 valve closed
7/31/2012	2:00:56 PM	SiCl4 pre valve closed
7/31/2012	2:00:56 PM	SiCl4 post valve closed
7/31/2012	2:00:56 PM	Main Vac valve closed
7/31/2012	2:00:56 PM	Bypass valve closed
7/31/2012	2:00:56 PM	H2 valve opened
7/31/2012	2:00:56 PM	Bubbler valve opened
7/31/2012	2:00:56 PM	Helium MFC set to  0.000000
7/31/2012	2:00:56 PM	H2 MFC set to  500.000000
7/31/2012	2:00:56 PM	BCl3 MFC set to  0.000000
7/31/2012	2:00:56 PM	PH3 MFC set to  0.000000
7/31/2012	2:00:56 PM	SiCl4 MFC set to  0.000000
7/31/2012	2:00:56 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	2:00:56 PM	Tube furnace set to 0
7/31/2012	2:00:57 PM	Helium valve closed
7/31/2012	2:00:57 PM	BCl3 valve closed
7/31/2012	2:00:57 PM	PH3 valve closed
7/31/2012	2:00:57 PM	SiCl4 pre valve closed
7/31/2012	2:00:57 PM	SiCl4 post valve closed
7/31/2012	2:00:57 PM	Main Vac valve closed
7/31/2012	2:00:57 PM	Bypass valve closed
7/31/2012	2:00:57 PM	H2 valve opened
7/31/2012	2:00:57 PM	Bubbler valve opened
7/31/2012	2:00:57 PM	Helium MFC set to  0.000000
7/31/2012	2:00:57 PM	H2 MFC set to  500.000000
7/31/2012	2:00:57 PM	BCl3 MFC set to  0.000000
7/31/2012	2:00:57 PM	PH3 MFC set to  0.000000
7/31/2012	2:00:57 PM	SiCl4 MFC set to  0.000000
7/31/2012	2:00:57 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	2:00:57 PM	Tube furnace set to 950
7/31/2012	2:15:57 PM	Helium valve closed
7/31/2012	2:15:57 PM	BCl3 valve closed
7/31/2012	2:15:57 PM	SiCl4 pre valve closed
7/31/2012	2:15:57 PM	SiCl4 post valve closed
7/31/2012	2:15:57 PM	Main Vac valve closed
7/31/2012	2:15:57 PM	Bypass valve closed
7/31/2012	2:15:57 PM	H2 valve opened
7/31/2012	2:15:57 PM	PH3 valve opened
7/31/2012	2:15:57 PM	Bubbler valve opened
7/31/2012	2:15:57 PM	Helium MFC set to  0.000000
7/31/2012	2:15:57 PM	H2 MFC set to  400.000000
7/31/2012	2:15:57 PM	BCl3 MFC set to  0.000000
7/31/2012	2:15:57 PM	PH3 MFC set to  20.000000
7/31/2012	2:15:57 PM	SiCl4 MFC set to  0.000000
7/31/2012	2:15:57 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	2:15:58 PM	Tube furnace set to 950
7/31/2012	2:35:58 PM	Helium valve closed
7/31/2012	2:35:58 PM	BCl3 valve closed
7/31/2012	2:35:58 PM	PH3 valve closed
7/31/2012	2:35:58 PM	SiCl4 pre valve closed
7/31/2012	2:35:58 PM	SiCl4 post valve closed
7/31/2012	2:35:58 PM	Main Vac valve closed
7/31/2012	2:35:58 PM	Bypass valve closed
7/31/2012	2:35:58 PM	H2 valve opened
7/31/2012	2:35:58 PM	Bubbler valve opened
7/31/2012	2:35:58 PM	Helium MFC set to  0.000000
7/31/2012	2:35:58 PM	H2 MFC set to  500.000000
7/31/2012	2:35:58 PM	BCl3 MFC set to  0.000000
7/31/2012	2:35:58 PM	PH3 MFC set to  0.000000
7/31/2012	2:35:58 PM	SiCl4 MFC set to  0.000000
7/31/2012	2:35:58 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	2:35:58 PM	Tube furnace set to 750
7/31/2012	2:40:58 PM	H2 valve closed
7/31/2012	2:40:58 PM	BCl3 valve closed
7/31/2012	2:40:58 PM	PH3 valve closed
7/31/2012	2:40:58 PM	SiCl4 pre valve closed
7/31/2012	2:40:58 PM	SiCl4 post valve closed
7/31/2012	2:40:58 PM	Main Vac valve closed
7/31/2012	2:40:58 PM	Bypass valve closed
7/31/2012	2:40:58 PM	Helium valve opened
7/31/2012	2:40:58 PM	Bubbler valve opened
7/31/2012	2:40:58 PM	Helium MFC set to  500.000000
7/31/2012	2:40:58 PM	H2 MFC set to  0.000000
7/31/2012	2:40:58 PM	BCl3 MFC set to  0.000000
7/31/2012	2:40:58 PM	PH3 MFC set to  0.000000
7/31/2012	2:40:58 PM	SiCl4 MFC set to  0.000000
7/31/2012	2:40:58 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	2:40:58 PM	Tube furnace set to 0
7/31/2012	2:54:07 PM	Helium valve closed
7/31/2012	2:54:07 PM	H2 valve closed
7/31/2012	2:54:07 PM	BCl3 valve closed
7/31/2012	2:54:07 PM	PH3 valve closed
7/31/2012	2:54:07 PM	SiCl4 pre valve closed
7/31/2012	2:54:07 PM	SiCl4 post valve closed
7/31/2012	2:54:07 PM	Main Vac valve closed
7/31/2012	2:54:07 PM	Bypass valve closed
7/31/2012	2:54:07 PM	Bubbler valve closed
7/31/2012	2:54:07 PM	Helium MFC set to  0.000000
7/31/2012	2:54:07 PM	H2 MFC set to  0.000000
7/31/2012	2:54:07 PM	BCl3 MFC set to  0.000000
7/31/2012	2:54:07 PM	PH3 MFC set to  0.000000
7/31/2012	2:54:07 PM	SiCl4 MFC set to  0.000000
7/31/2012	2:54:07 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	2:54:07 PM	Tube furnace set to 0
7/31/2012	2:54:08 PM	Run finished at 2:54 PM
7/31/2012	3:12:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2012	3:12:16 PM	Recipe started at 3:12 PM
7/31/2012	3:12:16 PM	Helium valve closed
7/31/2012	3:12:16 PM	H2 valve closed
7/31/2012	3:12:16 PM	BCl3 valve closed
7/31/2012	3:12:16 PM	PH3 valve closed
7/31/2012	3:12:16 PM	SiCl4 pre valve closed
7/31/2012	3:12:16 PM	SiCl4 post valve closed
7/31/2012	3:12:16 PM	Main Vac valve closed
7/31/2012	3:12:16 PM	Bubbler valve closed
7/31/2012	3:12:16 PM	Bypass valve opened
7/31/2012	3:12:16 PM	Helium MFC set to  0.000000
7/31/2012	3:12:16 PM	H2 MFC set to  0.000000
7/31/2012	3:12:16 PM	BCl3 MFC set to  0.000000
7/31/2012	3:12:16 PM	PH3 MFC set to  0.000000
7/31/2012	3:12:16 PM	SiCl4 MFC set to  0.000000
7/31/2012	3:12:16 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	3:12:16 PM	Tube furnace set to 0
7/31/2012	3:13:16 PM	Helium valve closed
7/31/2012	3:13:16 PM	H2 valve closed
7/31/2012	3:13:16 PM	BCl3 valve closed
7/31/2012	3:13:16 PM	PH3 valve closed
7/31/2012	3:13:16 PM	SiCl4 pre valve closed
7/31/2012	3:13:16 PM	SiCl4 post valve closed
7/31/2012	3:13:16 PM	Main Vac valve closed
7/31/2012	3:13:16 PM	Bubbler valve closed
7/31/2012	3:13:16 PM	Bypass valve opened
7/31/2012	3:13:16 PM	Helium MFC set to  0.000000
7/31/2012	3:13:16 PM	H2 MFC set to  0.000000
7/31/2012	3:13:16 PM	BCl3 MFC set to  0.000000
7/31/2012	3:13:16 PM	PH3 MFC set to  0.000000
7/31/2012	3:13:16 PM	SiCl4 MFC set to  0.000000
7/31/2012	3:13:16 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	3:13:16 PM	Tube furnace set to 0
7/31/2012	3:14:16 PM	Helium valve closed
7/31/2012	3:14:16 PM	H2 valve closed
7/31/2012	3:14:16 PM	BCl3 valve closed
7/31/2012	3:14:16 PM	PH3 valve closed
7/31/2012	3:14:16 PM	SiCl4 pre valve closed
7/31/2012	3:14:16 PM	SiCl4 post valve closed
7/31/2012	3:14:16 PM	Bypass valve closed
7/31/2012	3:14:16 PM	Bubbler valve closed
7/31/2012	3:14:16 PM	Main Vac valve opened
7/31/2012	3:14:16 PM	Helium MFC set to  0.000000
7/31/2012	3:14:16 PM	H2 MFC set to  0.000000
7/31/2012	3:14:16 PM	BCl3 MFC set to  0.000000
7/31/2012	3:14:16 PM	PH3 MFC set to  0.000000
7/31/2012	3:14:16 PM	SiCl4 MFC set to  0.000000
7/31/2012	3:14:16 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	3:14:17 PM	Tube furnace set to 0
7/31/2012	3:14:18 PM	Run finished at 3:14 PM
7/31/2012	3:14:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2012	3:37:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2012	3:37:23 PM	Recipe started at 3:37 PM
7/31/2012	3:37:23 PM	Helium valve closed
7/31/2012	3:37:23 PM	H2 valve closed
7/31/2012	3:37:23 PM	BCl3 valve closed
7/31/2012	3:37:23 PM	PH3 valve closed
7/31/2012	3:37:23 PM	SiCl4 pre valve closed
7/31/2012	3:37:23 PM	SiCl4 post valve closed
7/31/2012	3:37:23 PM	Main Vac valve closed
7/31/2012	3:37:23 PM	Bypass valve closed
7/31/2012	3:37:23 PM	Bubbler valve closed
7/31/2012	3:37:23 PM	Helium MFC set to  0.000000
7/31/2012	3:37:23 PM	H2 MFC set to  0.000000
7/31/2012	3:37:23 PM	BCl3 MFC set to  0.000000
7/31/2012	3:37:23 PM	PH3 MFC set to  0.000000
7/31/2012	3:37:23 PM	SiCl4 MFC set to  0.000000
7/31/2012	3:37:23 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	3:37:23 PM	Tube furnace set to 0
7/31/2012	3:37:26 PM	H2 valve closed
7/31/2012	3:37:26 PM	BCl3 valve closed
7/31/2012	3:37:26 PM	PH3 valve closed
7/31/2012	3:37:26 PM	SiCl4 pre valve closed
7/31/2012	3:37:26 PM	SiCl4 post valve closed
7/31/2012	3:37:26 PM	Main Vac valve closed
7/31/2012	3:37:26 PM	Bypass valve closed
7/31/2012	3:37:26 PM	Bubbler valve closed
7/31/2012	3:37:26 PM	Helium valve opened
7/31/2012	3:37:26 PM	Helium MFC set to  500.000000
7/31/2012	3:37:26 PM	H2 MFC set to  0.000000
7/31/2012	3:37:26 PM	BCl3 MFC set to  0.000000
7/31/2012	3:37:26 PM	PH3 MFC set to  0.000000
7/31/2012	3:37:26 PM	SiCl4 MFC set to  0.000000
7/31/2012	3:37:26 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	3:37:26 PM	Tube furnace set to 0
7/31/2012	3:38:39 PM	Helium valve closed
7/31/2012	3:38:39 PM	H2 valve closed
7/31/2012	3:38:39 PM	BCl3 valve closed
7/31/2012	3:38:39 PM	PH3 valve closed
7/31/2012	3:38:39 PM	SiCl4 pre valve closed
7/31/2012	3:38:39 PM	SiCl4 post valve closed
7/31/2012	3:38:39 PM	Main Vac valve closed
7/31/2012	3:38:39 PM	Bypass valve closed
7/31/2012	3:38:39 PM	Bubbler valve closed
7/31/2012	3:38:39 PM	Helium MFC set to  0.000000
7/31/2012	3:38:39 PM	H2 MFC set to  0.000000
7/31/2012	3:38:39 PM	BCl3 MFC set to  0.000000
7/31/2012	3:38:39 PM	PH3 MFC set to  0.000000
7/31/2012	3:38:39 PM	SiCl4 MFC set to  0.000000
7/31/2012	3:38:39 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	3:38:39 PM	Tube furnace set to 0
7/31/2012	3:38:40 PM	Run finished at 3:38 PM
7/31/2012	3:38:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2012	3:40:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2012	3:40:58 PM	Recipe started at 3:40 PM
7/31/2012	3:40:58 PM	Helium valve closed
7/31/2012	3:40:58 PM	H2 valve closed
7/31/2012	3:40:58 PM	BCl3 valve closed
7/31/2012	3:40:58 PM	PH3 valve closed
7/31/2012	3:40:58 PM	SiCl4 pre valve closed
7/31/2012	3:40:58 PM	SiCl4 post valve closed
7/31/2012	3:40:58 PM	Main Vac valve closed
7/31/2012	3:40:58 PM	Bubbler valve closed
7/31/2012	3:40:58 PM	Bypass valve opened
7/31/2012	3:40:58 PM	Helium MFC set to  0.000000
7/31/2012	3:40:58 PM	H2 MFC set to  0.000000
7/31/2012	3:40:58 PM	BCl3 MFC set to  0.000000
7/31/2012	3:40:58 PM	PH3 MFC set to  0.000000
7/31/2012	3:40:58 PM	SiCl4 MFC set to  0.000000
7/31/2012	3:40:58 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	3:40:58 PM	Tube furnace set to 0
7/31/2012	3:42:12 PM	Helium valve closed
7/31/2012	3:42:12 PM	H2 valve closed
7/31/2012	3:42:12 PM	BCl3 valve closed
7/31/2012	3:42:12 PM	PH3 valve closed
7/31/2012	3:42:12 PM	SiCl4 pre valve closed
7/31/2012	3:42:12 PM	SiCl4 post valve closed
7/31/2012	3:42:12 PM	Main Vac valve closed
7/31/2012	3:42:12 PM	Bubbler valve closed
7/31/2012	3:42:12 PM	Bypass valve opened
7/31/2012	3:42:12 PM	Helium MFC set to  0.000000
7/31/2012	3:42:12 PM	H2 MFC set to  0.000000
7/31/2012	3:42:12 PM	BCl3 MFC set to  0.000000
7/31/2012	3:42:12 PM	PH3 MFC set to  0.000000
7/31/2012	3:42:12 PM	SiCl4 MFC set to  0.000000
7/31/2012	3:42:12 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	3:42:12 PM	Tube furnace set to 0
7/31/2012	3:43:12 PM	Helium valve closed
7/31/2012	3:43:12 PM	H2 valve closed
7/31/2012	3:43:12 PM	BCl3 valve closed
7/31/2012	3:43:12 PM	PH3 valve closed
7/31/2012	3:43:12 PM	SiCl4 pre valve closed
7/31/2012	3:43:12 PM	SiCl4 post valve closed
7/31/2012	3:43:12 PM	Bypass valve closed
7/31/2012	3:43:12 PM	Bubbler valve closed
7/31/2012	3:43:12 PM	Main Vac valve opened
7/31/2012	3:43:12 PM	Helium MFC set to  0.000000
7/31/2012	3:43:12 PM	H2 MFC set to  0.000000
7/31/2012	3:43:12 PM	BCl3 MFC set to  0.000000
7/31/2012	3:43:12 PM	PH3 MFC set to  0.000000
7/31/2012	3:43:12 PM	SiCl4 MFC set to  0.000000
7/31/2012	3:43:12 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	3:43:12 PM	Tube furnace set to 0
7/31/2012	3:43:13 PM	Run finished at 3:43 PM
7/31/2012	3:43:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2012	4:27:54 PM	Main Vac valve closed
7/31/2012	4:28:00 PM	Main Vac valve opened
7/31/2012	4:28:21 PM	Recipe started at 4:28 PM
7/31/2012	4:28:21 PM	Helium valve closed
7/31/2012	4:28:21 PM	H2 valve closed
7/31/2012	4:28:21 PM	BCl3 valve closed
7/31/2012	4:28:21 PM	PH3 valve closed
7/31/2012	4:28:21 PM	SiCl4 pre valve closed
7/31/2012	4:28:21 PM	SiCl4 post valve closed
7/31/2012	4:28:21 PM	Main Vac valve closed
7/31/2012	4:28:21 PM	Bypass valve closed
7/31/2012	4:28:21 PM	Bubbler valve closed
7/31/2012	4:28:21 PM	Helium MFC set to  0.000000
7/31/2012	4:28:21 PM	H2 MFC set to  0.000000
7/31/2012	4:28:21 PM	BCl3 MFC set to  0.000000
7/31/2012	4:28:21 PM	PH3 MFC set to  0.000000
7/31/2012	4:28:21 PM	SiCl4 MFC set to  0.000000
7/31/2012	4:28:21 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	4:28:21 PM	Tube furnace set to 0
7/31/2012	4:28:24 PM	Helium valve closed
7/31/2012	4:28:24 PM	BCl3 valve closed
7/31/2012	4:28:24 PM	PH3 valve closed
7/31/2012	4:28:24 PM	SiCl4 pre valve closed
7/31/2012	4:28:24 PM	SiCl4 post valve closed
7/31/2012	4:28:24 PM	Main Vac valve closed
7/31/2012	4:28:24 PM	Bypass valve closed
7/31/2012	4:28:24 PM	Bubbler valve closed
7/31/2012	4:28:24 PM	H2 valve opened
7/31/2012	4:28:24 PM	Helium MFC set to  0.000000
7/31/2012	4:28:24 PM	H2 MFC set to  500.000000
7/31/2012	4:28:24 PM	BCl3 MFC set to  0.000000
7/31/2012	4:28:24 PM	PH3 MFC set to  0.000000
7/31/2012	4:28:24 PM	SiCl4 MFC set to  0.000000
7/31/2012	4:28:24 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	4:28:24 PM	Tube furnace set to 0
7/31/2012	4:29:39 PM	Helium valve closed
7/31/2012	4:29:39 PM	BCl3 valve closed
7/31/2012	4:29:39 PM	PH3 valve closed
7/31/2012	4:29:39 PM	SiCl4 pre valve closed
7/31/2012	4:29:39 PM	SiCl4 post valve closed
7/31/2012	4:29:39 PM	Main Vac valve closed
7/31/2012	4:29:39 PM	Bypass valve closed
7/31/2012	4:29:39 PM	H2 valve opened
7/31/2012	4:29:39 PM	Bubbler valve opened
7/31/2012	4:29:39 PM	Helium MFC set to  0.000000
7/31/2012	4:29:39 PM	H2 MFC set to  500.000000
7/31/2012	4:29:39 PM	BCl3 MFC set to  0.000000
7/31/2012	4:29:39 PM	PH3 MFC set to  0.000000
7/31/2012	4:29:39 PM	SiCl4 MFC set to  0.000000
7/31/2012	4:29:39 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	4:29:39 PM	Tube furnace set to 0
7/31/2012	4:29:40 PM	Helium valve closed
7/31/2012	4:29:40 PM	BCl3 valve closed
7/31/2012	4:29:40 PM	PH3 valve closed
7/31/2012	4:29:40 PM	SiCl4 pre valve closed
7/31/2012	4:29:40 PM	SiCl4 post valve closed
7/31/2012	4:29:40 PM	Main Vac valve closed
7/31/2012	4:29:40 PM	Bypass valve closed
7/31/2012	4:29:40 PM	H2 valve opened
7/31/2012	4:29:40 PM	Bubbler valve opened
7/31/2012	4:29:40 PM	Helium MFC set to  0.000000
7/31/2012	4:29:40 PM	H2 MFC set to  500.000000
7/31/2012	4:29:40 PM	BCl3 MFC set to  0.000000
7/31/2012	4:29:40 PM	PH3 MFC set to  0.000000
7/31/2012	4:29:40 PM	SiCl4 MFC set to  0.000000
7/31/2012	4:29:40 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	4:29:40 PM	Tube furnace set to 950
7/31/2012	4:44:40 PM	Helium valve closed
7/31/2012	4:44:40 PM	BCl3 valve closed
7/31/2012	4:44:40 PM	SiCl4 pre valve closed
7/31/2012	4:44:40 PM	SiCl4 post valve closed
7/31/2012	4:44:40 PM	Main Vac valve closed
7/31/2012	4:44:40 PM	Bypass valve closed
7/31/2012	4:44:40 PM	H2 valve opened
7/31/2012	4:44:40 PM	PH3 valve opened
7/31/2012	4:44:40 PM	Bubbler valve opened
7/31/2012	4:44:40 PM	Helium MFC set to  0.000000
7/31/2012	4:44:40 PM	H2 MFC set to  400.000000
7/31/2012	4:44:40 PM	BCl3 MFC set to  0.000000
7/31/2012	4:44:40 PM	PH3 MFC set to  20.000000
7/31/2012	4:44:40 PM	SiCl4 MFC set to  0.000000
7/31/2012	4:44:40 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	4:44:40 PM	Tube furnace set to 950
7/31/2012	5:04:40 PM	Helium valve closed
7/31/2012	5:04:40 PM	BCl3 valve closed
7/31/2012	5:04:40 PM	PH3 valve closed
7/31/2012	5:04:40 PM	SiCl4 pre valve closed
7/31/2012	5:04:40 PM	SiCl4 post valve closed
7/31/2012	5:04:40 PM	Main Vac valve closed
7/31/2012	5:04:40 PM	Bypass valve closed
7/31/2012	5:04:40 PM	H2 valve opened
7/31/2012	5:04:40 PM	Bubbler valve opened
7/31/2012	5:04:40 PM	Helium MFC set to  0.000000
7/31/2012	5:04:40 PM	H2 MFC set to  500.000000
7/31/2012	5:04:40 PM	BCl3 MFC set to  0.000000
7/31/2012	5:04:40 PM	PH3 MFC set to  0.000000
7/31/2012	5:04:40 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:04:40 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:04:41 PM	Tube furnace set to 750
7/31/2012	5:09:40 PM	H2 valve closed
7/31/2012	5:09:40 PM	BCl3 valve closed
7/31/2012	5:09:40 PM	PH3 valve closed
7/31/2012	5:09:40 PM	SiCl4 pre valve closed
7/31/2012	5:09:40 PM	SiCl4 post valve closed
7/31/2012	5:09:40 PM	Main Vac valve closed
7/31/2012	5:09:40 PM	Bypass valve closed
7/31/2012	5:09:40 PM	Helium valve opened
7/31/2012	5:09:40 PM	Bubbler valve opened
7/31/2012	5:09:40 PM	Helium MFC set to  500.000000
7/31/2012	5:09:40 PM	H2 MFC set to  0.000000
7/31/2012	5:09:40 PM	BCl3 MFC set to  0.000000
7/31/2012	5:09:40 PM	PH3 MFC set to  0.000000
7/31/2012	5:09:40 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:09:40 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:09:41 PM	Tube furnace set to 0
7/31/2012	5:14:12 PM	Helium valve closed
7/31/2012	5:14:12 PM	H2 valve closed
7/31/2012	5:14:12 PM	BCl3 valve closed
7/31/2012	5:14:12 PM	PH3 valve closed
7/31/2012	5:14:12 PM	SiCl4 pre valve closed
7/31/2012	5:14:12 PM	SiCl4 post valve closed
7/31/2012	5:14:12 PM	Main Vac valve closed
7/31/2012	5:14:12 PM	Bypass valve closed
7/31/2012	5:14:12 PM	Bubbler valve closed
7/31/2012	5:14:12 PM	Helium MFC set to  0.000000
7/31/2012	5:14:12 PM	H2 MFC set to  0.000000
7/31/2012	5:14:12 PM	BCl3 MFC set to  0.000000
7/31/2012	5:14:12 PM	PH3 MFC set to  0.000000
7/31/2012	5:14:12 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:14:12 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:14:13 PM	Tube furnace set to 0
7/31/2012	5:14:14 PM	Run finished at 5:14 PM
7/31/2012	5:18:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2012	5:18:28 PM	Recipe started at 5:18 PM
7/31/2012	5:18:28 PM	Helium valve closed
7/31/2012	5:18:28 PM	H2 valve closed
7/31/2012	5:18:28 PM	BCl3 valve closed
7/31/2012	5:18:28 PM	PH3 valve closed
7/31/2012	5:18:28 PM	SiCl4 pre valve closed
7/31/2012	5:18:28 PM	SiCl4 post valve closed
7/31/2012	5:18:28 PM	Main Vac valve closed
7/31/2012	5:18:28 PM	Bubbler valve closed
7/31/2012	5:18:28 PM	Bypass valve opened
7/31/2012	5:18:28 PM	Helium MFC set to  0.000000
7/31/2012	5:18:28 PM	H2 MFC set to  0.000000
7/31/2012	5:18:28 PM	BCl3 MFC set to  0.000000
7/31/2012	5:18:28 PM	PH3 MFC set to  0.000000
7/31/2012	5:18:28 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:18:28 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:18:28 PM	Tube furnace set to 0
7/31/2012	5:19:37 PM	Helium valve closed
7/31/2012	5:19:37 PM	H2 valve closed
7/31/2012	5:19:37 PM	BCl3 valve closed
7/31/2012	5:19:37 PM	PH3 valve closed
7/31/2012	5:19:37 PM	SiCl4 pre valve closed
7/31/2012	5:19:37 PM	SiCl4 post valve closed
7/31/2012	5:19:37 PM	Main Vac valve closed
7/31/2012	5:19:37 PM	Bubbler valve closed
7/31/2012	5:19:37 PM	Bypass valve opened
7/31/2012	5:19:37 PM	Helium MFC set to  0.000000
7/31/2012	5:19:37 PM	H2 MFC set to  0.000000
7/31/2012	5:19:37 PM	BCl3 MFC set to  0.000000
7/31/2012	5:19:37 PM	PH3 MFC set to  0.000000
7/31/2012	5:19:37 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:19:37 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:19:37 PM	Tube furnace set to 0
7/31/2012	5:20:37 PM	Helium valve closed
7/31/2012	5:20:37 PM	H2 valve closed
7/31/2012	5:20:37 PM	BCl3 valve closed
7/31/2012	5:20:37 PM	PH3 valve closed
7/31/2012	5:20:37 PM	SiCl4 pre valve closed
7/31/2012	5:20:37 PM	SiCl4 post valve closed
7/31/2012	5:20:37 PM	Bypass valve closed
7/31/2012	5:20:37 PM	Bubbler valve closed
7/31/2012	5:20:37 PM	Main Vac valve opened
7/31/2012	5:20:37 PM	Helium MFC set to  0.000000
7/31/2012	5:20:37 PM	H2 MFC set to  0.000000
7/31/2012	5:20:37 PM	BCl3 MFC set to  0.000000
7/31/2012	5:20:37 PM	PH3 MFC set to  0.000000
7/31/2012	5:20:37 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:20:37 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:20:38 PM	Tube furnace set to 0
7/31/2012	5:20:39 PM	Run finished at 5:20 PM
7/31/2012	5:20:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2012	5:24:06 PM	Recipe started at 5:24 PM
7/31/2012	5:24:07 PM	Helium valve closed
7/31/2012	5:24:07 PM	H2 valve closed
7/31/2012	5:24:07 PM	BCl3 valve closed
7/31/2012	5:24:07 PM	PH3 valve closed
7/31/2012	5:24:07 PM	SiCl4 pre valve closed
7/31/2012	5:24:07 PM	SiCl4 post valve closed
7/31/2012	5:24:07 PM	Bypass valve closed
7/31/2012	5:24:07 PM	Bubbler valve closed
7/31/2012	5:24:07 PM	Main Vac valve opened
7/31/2012	5:24:07 PM	Helium MFC set to  0.000000
7/31/2012	5:24:07 PM	H2 MFC set to  0.000000
7/31/2012	5:24:07 PM	BCl3 MFC set to  0.000000
7/31/2012	5:24:07 PM	PH3 MFC set to  0.000000
7/31/2012	5:24:07 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:24:07 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:24:07 PM	Tube furnace set to 150
7/31/2012	5:24:37 PM	H2 valve closed
7/31/2012	5:24:37 PM	BCl3 valve closed
7/31/2012	5:24:37 PM	PH3 valve closed
7/31/2012	5:24:37 PM	SiCl4 pre valve closed
7/31/2012	5:24:37 PM	SiCl4 post valve closed
7/31/2012	5:24:37 PM	Bypass valve closed
7/31/2012	5:24:37 PM	Bubbler valve closed
7/31/2012	5:24:37 PM	Helium valve opened
7/31/2012	5:24:37 PM	Main Vac valve opened
7/31/2012	5:24:37 PM	Helium MFC set to  20.000000
7/31/2012	5:24:37 PM	H2 MFC set to  0.000000
7/31/2012	5:24:37 PM	BCl3 MFC set to  0.000000
7/31/2012	5:24:37 PM	PH3 MFC set to  0.000000
7/31/2012	5:24:37 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:24:37 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:24:37 PM	Tube furnace set to 150
7/31/2012	5:25:07 PM	Helium valve closed
7/31/2012	5:25:07 PM	H2 valve closed
7/31/2012	5:25:07 PM	BCl3 valve closed
7/31/2012	5:25:07 PM	PH3 valve closed
7/31/2012	5:25:07 PM	SiCl4 pre valve closed
7/31/2012	5:25:07 PM	SiCl4 post valve closed
7/31/2012	5:25:07 PM	Bypass valve closed
7/31/2012	5:25:07 PM	Bubbler valve closed
7/31/2012	5:25:07 PM	Main Vac valve opened
7/31/2012	5:25:07 PM	Helium MFC set to  0.000000
7/31/2012	5:25:07 PM	H2 MFC set to  0.000000
7/31/2012	5:25:07 PM	BCl3 MFC set to  0.000000
7/31/2012	5:25:07 PM	PH3 MFC set to  0.000000
7/31/2012	5:25:07 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:25:07 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:25:07 PM	Tube furnace set to 150
7/31/2012	5:25:37 PM	H2 valve closed
7/31/2012	5:25:37 PM	BCl3 valve closed
7/31/2012	5:25:37 PM	PH3 valve closed
7/31/2012	5:25:37 PM	SiCl4 pre valve closed
7/31/2012	5:25:37 PM	SiCl4 post valve closed
7/31/2012	5:25:37 PM	Bypass valve closed
7/31/2012	5:25:37 PM	Bubbler valve closed
7/31/2012	5:25:37 PM	Helium valve opened
7/31/2012	5:25:37 PM	Main Vac valve opened
7/31/2012	5:25:37 PM	Helium MFC set to  20.000000
7/31/2012	5:25:37 PM	H2 MFC set to  0.000000
7/31/2012	5:25:37 PM	BCl3 MFC set to  0.000000
7/31/2012	5:25:37 PM	PH3 MFC set to  0.000000
7/31/2012	5:25:37 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:25:37 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:25:37 PM	Tube furnace set to 150
7/31/2012	5:26:07 PM	Helium valve closed
7/31/2012	5:26:07 PM	H2 valve closed
7/31/2012	5:26:07 PM	BCl3 valve closed
7/31/2012	5:26:07 PM	PH3 valve closed
7/31/2012	5:26:07 PM	SiCl4 pre valve closed
7/31/2012	5:26:07 PM	SiCl4 post valve closed
7/31/2012	5:26:07 PM	Bypass valve closed
7/31/2012	5:26:07 PM	Bubbler valve closed
7/31/2012	5:26:08 PM	Main Vac valve opened
7/31/2012	5:26:08 PM	Helium MFC set to  0.000000
7/31/2012	5:26:08 PM	H2 MFC set to  0.000000
7/31/2012	5:26:08 PM	BCl3 MFC set to  0.000000
7/31/2012	5:26:08 PM	PH3 MFC set to  0.000000
7/31/2012	5:26:08 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:26:08 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:26:08 PM	Tube furnace set to 150
7/31/2012	5:26:38 PM	H2 valve closed
7/31/2012	5:26:38 PM	BCl3 valve closed
7/31/2012	5:26:38 PM	PH3 valve closed
7/31/2012	5:26:38 PM	SiCl4 pre valve closed
7/31/2012	5:26:38 PM	SiCl4 post valve closed
7/31/2012	5:26:38 PM	Bypass valve closed
7/31/2012	5:26:38 PM	Bubbler valve closed
7/31/2012	5:26:38 PM	Helium valve opened
7/31/2012	5:26:38 PM	Main Vac valve opened
7/31/2012	5:26:38 PM	Helium MFC set to  20.000000
7/31/2012	5:26:38 PM	H2 MFC set to  0.000000
7/31/2012	5:26:38 PM	BCl3 MFC set to  0.000000
7/31/2012	5:26:38 PM	PH3 MFC set to  0.000000
7/31/2012	5:26:38 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:26:38 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:26:38 PM	Tube furnace set to 150
7/31/2012	5:27:08 PM	Helium valve closed
7/31/2012	5:27:08 PM	H2 valve closed
7/31/2012	5:27:08 PM	BCl3 valve closed
7/31/2012	5:27:08 PM	PH3 valve closed
7/31/2012	5:27:08 PM	SiCl4 pre valve closed
7/31/2012	5:27:08 PM	SiCl4 post valve closed
7/31/2012	5:27:08 PM	Bypass valve closed
7/31/2012	5:27:08 PM	Bubbler valve closed
7/31/2012	5:27:08 PM	Main Vac valve opened
7/31/2012	5:27:08 PM	Helium MFC set to  0.000000
7/31/2012	5:27:08 PM	H2 MFC set to  0.000000
7/31/2012	5:27:08 PM	BCl3 MFC set to  0.000000
7/31/2012	5:27:08 PM	PH3 MFC set to  0.000000
7/31/2012	5:27:08 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:27:08 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:27:08 PM	Tube furnace set to 150
7/31/2012	5:27:38 PM	H2 valve closed
7/31/2012	5:27:38 PM	BCl3 valve closed
7/31/2012	5:27:38 PM	PH3 valve closed
7/31/2012	5:27:38 PM	SiCl4 pre valve closed
7/31/2012	5:27:38 PM	SiCl4 post valve closed
7/31/2012	5:27:38 PM	Bypass valve closed
7/31/2012	5:27:38 PM	Bubbler valve closed
7/31/2012	5:27:38 PM	Helium valve opened
7/31/2012	5:27:38 PM	Main Vac valve opened
7/31/2012	5:27:38 PM	Helium MFC set to  20.000000
7/31/2012	5:27:38 PM	H2 MFC set to  0.000000
7/31/2012	5:27:38 PM	BCl3 MFC set to  0.000000
7/31/2012	5:27:38 PM	PH3 MFC set to  0.000000
7/31/2012	5:27:38 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:27:38 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:27:38 PM	Tube furnace set to 150
7/31/2012	5:28:08 PM	Helium valve closed
7/31/2012	5:28:08 PM	H2 valve closed
7/31/2012	5:28:08 PM	BCl3 valve closed
7/31/2012	5:28:08 PM	PH3 valve closed
7/31/2012	5:28:08 PM	SiCl4 pre valve closed
7/31/2012	5:28:08 PM	SiCl4 post valve closed
7/31/2012	5:28:08 PM	Bypass valve closed
7/31/2012	5:28:08 PM	Bubbler valve closed
7/31/2012	5:28:08 PM	Main Vac valve opened
7/31/2012	5:28:08 PM	Helium MFC set to  0.000000
7/31/2012	5:28:08 PM	H2 MFC set to  0.000000
7/31/2012	5:28:08 PM	BCl3 MFC set to  0.000000
7/31/2012	5:28:08 PM	PH3 MFC set to  0.000000
7/31/2012	5:28:08 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:28:08 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:28:09 PM	Tube furnace set to 150
7/31/2012	5:28:39 PM	H2 valve closed
7/31/2012	5:28:39 PM	BCl3 valve closed
7/31/2012	5:28:39 PM	PH3 valve closed
7/31/2012	5:28:39 PM	SiCl4 pre valve closed
7/31/2012	5:28:39 PM	SiCl4 post valve closed
7/31/2012	5:28:39 PM	Bypass valve closed
7/31/2012	5:28:39 PM	Bubbler valve closed
7/31/2012	5:28:39 PM	Helium valve opened
7/31/2012	5:28:39 PM	Main Vac valve opened
7/31/2012	5:28:39 PM	Helium MFC set to  20.000000
7/31/2012	5:28:39 PM	H2 MFC set to  0.000000
7/31/2012	5:28:39 PM	BCl3 MFC set to  0.000000
7/31/2012	5:28:39 PM	PH3 MFC set to  0.000000
7/31/2012	5:28:39 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:28:39 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:28:39 PM	Tube furnace set to 150
7/31/2012	5:29:09 PM	Helium valve closed
7/31/2012	5:29:09 PM	H2 valve closed
7/31/2012	5:29:09 PM	BCl3 valve closed
7/31/2012	5:29:09 PM	PH3 valve closed
7/31/2012	5:29:09 PM	SiCl4 pre valve closed
7/31/2012	5:29:09 PM	SiCl4 post valve closed
7/31/2012	5:29:09 PM	Bypass valve closed
7/31/2012	5:29:09 PM	Bubbler valve closed
7/31/2012	5:29:09 PM	Main Vac valve opened
7/31/2012	5:29:09 PM	Helium MFC set to  0.000000
7/31/2012	5:29:09 PM	H2 MFC set to  0.000000
7/31/2012	5:29:09 PM	BCl3 MFC set to  0.000000
7/31/2012	5:29:09 PM	PH3 MFC set to  0.000000
7/31/2012	5:29:09 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:29:09 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:29:09 PM	Tube furnace set to 150
7/31/2012	5:29:39 PM	H2 valve closed
7/31/2012	5:29:39 PM	BCl3 valve closed
7/31/2012	5:29:39 PM	PH3 valve closed
7/31/2012	5:29:39 PM	SiCl4 pre valve closed
7/31/2012	5:29:39 PM	SiCl4 post valve closed
7/31/2012	5:29:39 PM	Bypass valve closed
7/31/2012	5:29:39 PM	Bubbler valve closed
7/31/2012	5:29:39 PM	Helium valve opened
7/31/2012	5:29:39 PM	Main Vac valve opened
7/31/2012	5:29:39 PM	Helium MFC set to  20.000000
7/31/2012	5:29:39 PM	H2 MFC set to  0.000000
7/31/2012	5:29:39 PM	BCl3 MFC set to  0.000000
7/31/2012	5:29:39 PM	PH3 MFC set to  0.000000
7/31/2012	5:29:39 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:29:39 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:29:39 PM	Tube furnace set to 150
7/31/2012	5:30:09 PM	Helium valve closed
7/31/2012	5:30:09 PM	H2 valve closed
7/31/2012	5:30:09 PM	BCl3 valve closed
7/31/2012	5:30:09 PM	PH3 valve closed
7/31/2012	5:30:09 PM	SiCl4 pre valve closed
7/31/2012	5:30:09 PM	SiCl4 post valve closed
7/31/2012	5:30:09 PM	Bypass valve closed
7/31/2012	5:30:09 PM	Bubbler valve closed
7/31/2012	5:30:09 PM	Main Vac valve opened
7/31/2012	5:30:09 PM	Helium MFC set to  0.000000
7/31/2012	5:30:09 PM	H2 MFC set to  0.000000
7/31/2012	5:30:09 PM	BCl3 MFC set to  0.000000
7/31/2012	5:30:09 PM	PH3 MFC set to  0.000000
7/31/2012	5:30:09 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:30:09 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:30:10 PM	Tube furnace set to 150
7/31/2012	5:30:40 PM	H2 valve closed
7/31/2012	5:30:40 PM	BCl3 valve closed
7/31/2012	5:30:40 PM	PH3 valve closed
7/31/2012	5:30:40 PM	SiCl4 pre valve closed
7/31/2012	5:30:40 PM	SiCl4 post valve closed
7/31/2012	5:30:40 PM	Bypass valve closed
7/31/2012	5:30:40 PM	Bubbler valve closed
7/31/2012	5:30:40 PM	Helium valve opened
7/31/2012	5:30:40 PM	Main Vac valve opened
7/31/2012	5:30:40 PM	Helium MFC set to  20.000000
7/31/2012	5:30:40 PM	H2 MFC set to  0.000000
7/31/2012	5:30:40 PM	BCl3 MFC set to  0.000000
7/31/2012	5:30:40 PM	PH3 MFC set to  0.000000
7/31/2012	5:30:40 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:30:40 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:30:40 PM	Tube furnace set to 150
7/31/2012	5:31:10 PM	Helium valve closed
7/31/2012	5:31:10 PM	H2 valve closed
7/31/2012	5:31:10 PM	BCl3 valve closed
7/31/2012	5:31:10 PM	PH3 valve closed
7/31/2012	5:31:10 PM	SiCl4 pre valve closed
7/31/2012	5:31:10 PM	SiCl4 post valve closed
7/31/2012	5:31:10 PM	Bypass valve closed
7/31/2012	5:31:10 PM	Bubbler valve closed
7/31/2012	5:31:10 PM	Main Vac valve opened
7/31/2012	5:31:10 PM	Helium MFC set to  0.000000
7/31/2012	5:31:10 PM	H2 MFC set to  0.000000
7/31/2012	5:31:10 PM	BCl3 MFC set to  0.000000
7/31/2012	5:31:10 PM	PH3 MFC set to  0.000000
7/31/2012	5:31:10 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:31:10 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:31:10 PM	Tube furnace set to 150
7/31/2012	5:31:40 PM	H2 valve closed
7/31/2012	5:31:40 PM	BCl3 valve closed
7/31/2012	5:31:40 PM	PH3 valve closed
7/31/2012	5:31:40 PM	SiCl4 pre valve closed
7/31/2012	5:31:40 PM	SiCl4 post valve closed
7/31/2012	5:31:40 PM	Bypass valve closed
7/31/2012	5:31:40 PM	Bubbler valve closed
7/31/2012	5:31:40 PM	Helium valve opened
7/31/2012	5:31:40 PM	Main Vac valve opened
7/31/2012	5:31:40 PM	Helium MFC set to  20.000000
7/31/2012	5:31:40 PM	H2 MFC set to  0.000000
7/31/2012	5:31:40 PM	BCl3 MFC set to  0.000000
7/31/2012	5:31:40 PM	PH3 MFC set to  0.000000
7/31/2012	5:31:40 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:31:40 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:31:40 PM	Tube furnace set to 150
7/31/2012	5:32:10 PM	Helium valve closed
7/31/2012	5:32:10 PM	H2 valve closed
7/31/2012	5:32:10 PM	BCl3 valve closed
7/31/2012	5:32:10 PM	PH3 valve closed
7/31/2012	5:32:10 PM	SiCl4 pre valve closed
7/31/2012	5:32:10 PM	SiCl4 post valve closed
7/31/2012	5:32:10 PM	Bypass valve closed
7/31/2012	5:32:10 PM	Bubbler valve closed
7/31/2012	5:32:10 PM	Main Vac valve opened
7/31/2012	5:32:10 PM	Helium MFC set to  0.000000
7/31/2012	5:32:10 PM	H2 MFC set to  0.000000
7/31/2012	5:32:10 PM	BCl3 MFC set to  0.000000
7/31/2012	5:32:10 PM	PH3 MFC set to  0.000000
7/31/2012	5:32:10 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:32:10 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:32:11 PM	Tube furnace set to 150
7/31/2012	5:32:41 PM	H2 valve closed
7/31/2012	5:32:41 PM	BCl3 valve closed
7/31/2012	5:32:41 PM	PH3 valve closed
7/31/2012	5:32:41 PM	SiCl4 pre valve closed
7/31/2012	5:32:41 PM	SiCl4 post valve closed
7/31/2012	5:32:41 PM	Bypass valve closed
7/31/2012	5:32:41 PM	Bubbler valve closed
7/31/2012	5:32:41 PM	Helium valve opened
7/31/2012	5:32:41 PM	Main Vac valve opened
7/31/2012	5:32:41 PM	Helium MFC set to  20.000000
7/31/2012	5:32:41 PM	H2 MFC set to  0.000000
7/31/2012	5:32:41 PM	BCl3 MFC set to  0.000000
7/31/2012	5:32:41 PM	PH3 MFC set to  0.000000
7/31/2012	5:32:41 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:32:41 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:32:41 PM	Tube furnace set to 150
7/31/2012	5:33:11 PM	Helium valve closed
7/31/2012	5:33:11 PM	H2 valve closed
7/31/2012	5:33:11 PM	BCl3 valve closed
7/31/2012	5:33:11 PM	PH3 valve closed
7/31/2012	5:33:11 PM	SiCl4 pre valve closed
7/31/2012	5:33:11 PM	SiCl4 post valve closed
7/31/2012	5:33:11 PM	Bypass valve closed
7/31/2012	5:33:11 PM	Bubbler valve closed
7/31/2012	5:33:11 PM	Main Vac valve opened
7/31/2012	5:33:11 PM	Helium MFC set to  0.000000
7/31/2012	5:33:11 PM	H2 MFC set to  0.000000
7/31/2012	5:33:11 PM	BCl3 MFC set to  0.000000
7/31/2012	5:33:11 PM	PH3 MFC set to  0.000000
7/31/2012	5:33:11 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:33:11 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:33:11 PM	Tube furnace set to 150
7/31/2012	5:33:41 PM	H2 valve closed
7/31/2012	5:33:41 PM	BCl3 valve closed
7/31/2012	5:33:41 PM	PH3 valve closed
7/31/2012	5:33:41 PM	SiCl4 pre valve closed
7/31/2012	5:33:41 PM	SiCl4 post valve closed
7/31/2012	5:33:41 PM	Bypass valve closed
7/31/2012	5:33:41 PM	Bubbler valve closed
7/31/2012	5:33:41 PM	Helium valve opened
7/31/2012	5:33:41 PM	Main Vac valve opened
7/31/2012	5:33:41 PM	Helium MFC set to  20.000000
7/31/2012	5:33:41 PM	H2 MFC set to  0.000000
7/31/2012	5:33:41 PM	BCl3 MFC set to  0.000000
7/31/2012	5:33:41 PM	PH3 MFC set to  0.000000
7/31/2012	5:33:41 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:33:41 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:33:41 PM	Tube furnace set to 150
7/31/2012	5:34:11 PM	Helium valve closed
7/31/2012	5:34:11 PM	H2 valve closed
7/31/2012	5:34:11 PM	BCl3 valve closed
7/31/2012	5:34:11 PM	PH3 valve closed
7/31/2012	5:34:11 PM	SiCl4 pre valve closed
7/31/2012	5:34:11 PM	SiCl4 post valve closed
7/31/2012	5:34:11 PM	Bypass valve closed
7/31/2012	5:34:11 PM	Bubbler valve closed
7/31/2012	5:34:11 PM	Main Vac valve opened
7/31/2012	5:34:11 PM	Helium MFC set to  0.000000
7/31/2012	5:34:11 PM	H2 MFC set to  0.000000
7/31/2012	5:34:11 PM	BCl3 MFC set to  0.000000
7/31/2012	5:34:11 PM	PH3 MFC set to  0.000000
7/31/2012	5:34:11 PM	SiCl4 MFC set to  0.000000
7/31/2012	5:34:11 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	5:34:11 PM	Tube furnace set to 150
7/31/2012	5:34:12 PM	Run finished at 5:34 PM
7/31/2012	7:54:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2012	7:54:27 PM	Recipe started at 7:54 PM
7/31/2012	7:54:27 PM	Helium valve closed
7/31/2012	7:54:27 PM	H2 valve closed
7/31/2012	7:54:27 PM	BCl3 valve closed
7/31/2012	7:54:27 PM	PH3 valve closed
7/31/2012	7:54:27 PM	SiCl4 pre valve closed
7/31/2012	7:54:27 PM	SiCl4 post valve closed
7/31/2012	7:54:27 PM	Main Vac valve closed
7/31/2012	7:54:27 PM	Bypass valve closed
7/31/2012	7:54:27 PM	Bubbler valve closed
7/31/2012	7:54:27 PM	Helium MFC set to  0.000000
7/31/2012	7:54:27 PM	H2 MFC set to  0.000000
7/31/2012	7:54:27 PM	BCl3 MFC set to  0.000000
7/31/2012	7:54:27 PM	PH3 MFC set to  0.000000
7/31/2012	7:54:27 PM	SiCl4 MFC set to  0.000000
7/31/2012	7:54:27 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	7:54:27 PM	Tube furnace set to 0
7/31/2012	7:54:30 PM	H2 valve closed
7/31/2012	7:54:30 PM	BCl3 valve closed
7/31/2012	7:54:30 PM	PH3 valve closed
7/31/2012	7:54:30 PM	SiCl4 pre valve closed
7/31/2012	7:54:30 PM	SiCl4 post valve closed
7/31/2012	7:54:30 PM	Main Vac valve closed
7/31/2012	7:54:30 PM	Bypass valve closed
7/31/2012	7:54:30 PM	Bubbler valve closed
7/31/2012	7:54:30 PM	Helium valve opened
7/31/2012	7:54:30 PM	Helium MFC set to  500.000000
7/31/2012	7:54:30 PM	H2 MFC set to  0.000000
7/31/2012	7:54:30 PM	BCl3 MFC set to  0.000000
7/31/2012	7:54:30 PM	PH3 MFC set to  0.000000
7/31/2012	7:54:30 PM	SiCl4 MFC set to  0.000000
7/31/2012	7:54:30 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	7:54:30 PM	Tube furnace set to 0
7/31/2012	7:55:40 PM	Helium valve closed
7/31/2012	7:55:40 PM	H2 valve closed
7/31/2012	7:55:40 PM	BCl3 valve closed
7/31/2012	7:55:40 PM	PH3 valve closed
7/31/2012	7:55:40 PM	SiCl4 pre valve closed
7/31/2012	7:55:40 PM	SiCl4 post valve closed
7/31/2012	7:55:40 PM	Main Vac valve closed
7/31/2012	7:55:40 PM	Bypass valve closed
7/31/2012	7:55:40 PM	Bubbler valve closed
7/31/2012	7:55:40 PM	Helium MFC set to  0.000000
7/31/2012	7:55:40 PM	H2 MFC set to  0.000000
7/31/2012	7:55:40 PM	BCl3 MFC set to  0.000000
7/31/2012	7:55:40 PM	PH3 MFC set to  0.000000
7/31/2012	7:55:40 PM	SiCl4 MFC set to  0.000000
7/31/2012	7:55:40 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	7:55:40 PM	Tube furnace set to 0
7/31/2012	7:55:41 PM	Run finished at 7:55 PM
7/31/2012	7:55:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/31/2012	8:17:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/31/2012	8:17:12 PM	Recipe started at 8:17 PM
7/31/2012	8:17:12 PM	Helium valve closed
7/31/2012	8:17:12 PM	H2 valve closed
7/31/2012	8:17:12 PM	BCl3 valve closed
7/31/2012	8:17:12 PM	PH3 valve closed
7/31/2012	8:17:12 PM	SiCl4 pre valve closed
7/31/2012	8:17:12 PM	SiCl4 post valve closed
7/31/2012	8:17:12 PM	Main Vac valve closed
7/31/2012	8:17:12 PM	Bubbler valve closed
7/31/2012	8:17:12 PM	Bypass valve opened
7/31/2012	8:17:12 PM	Helium MFC set to  0.000000
7/31/2012	8:17:12 PM	H2 MFC set to  0.000000
7/31/2012	8:17:12 PM	BCl3 MFC set to  0.000000
7/31/2012	8:17:12 PM	PH3 MFC set to  0.000000
7/31/2012	8:17:12 PM	SiCl4 MFC set to  0.000000
7/31/2012	8:17:12 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	8:17:13 PM	Tube furnace set to 0
7/31/2012	8:18:10 PM	Helium valve closed
7/31/2012	8:18:10 PM	H2 valve closed
7/31/2012	8:18:10 PM	BCl3 valve closed
7/31/2012	8:18:10 PM	PH3 valve closed
7/31/2012	8:18:10 PM	SiCl4 pre valve closed
7/31/2012	8:18:10 PM	SiCl4 post valve closed
7/31/2012	8:18:10 PM	Main Vac valve closed
7/31/2012	8:18:10 PM	Bubbler valve closed
7/31/2012	8:18:10 PM	Bypass valve opened
7/31/2012	8:18:10 PM	Helium MFC set to  0.000000
7/31/2012	8:18:10 PM	H2 MFC set to  0.000000
7/31/2012	8:18:10 PM	BCl3 MFC set to  0.000000
7/31/2012	8:18:10 PM	PH3 MFC set to  0.000000
7/31/2012	8:18:10 PM	SiCl4 MFC set to  0.000000
7/31/2012	8:18:10 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	8:18:10 PM	Tube furnace set to 0
7/31/2012	8:19:10 PM	Helium valve closed
7/31/2012	8:19:10 PM	H2 valve closed
7/31/2012	8:19:10 PM	BCl3 valve closed
7/31/2012	8:19:10 PM	PH3 valve closed
7/31/2012	8:19:10 PM	SiCl4 pre valve closed
7/31/2012	8:19:10 PM	SiCl4 post valve closed
7/31/2012	8:19:10 PM	Bypass valve closed
7/31/2012	8:19:10 PM	Bubbler valve closed
7/31/2012	8:19:10 PM	Main Vac valve opened
7/31/2012	8:19:10 PM	Helium MFC set to  0.000000
7/31/2012	8:19:10 PM	H2 MFC set to  0.000000
7/31/2012	8:19:10 PM	BCl3 MFC set to  0.000000
7/31/2012	8:19:10 PM	PH3 MFC set to  0.000000
7/31/2012	8:19:10 PM	SiCl4 MFC set to  0.000000
7/31/2012	8:19:10 PM	Bypass solenoid MFC set to  0.000000
7/31/2012	8:19:10 PM	Tube furnace set to 0
7/31/2012	8:19:11 PM	Run finished at 8:19 PM
7/31/2012	8:19:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
